JPS6244412B2 - - Google Patents

Info

Publication number
JPS6244412B2
JPS6244412B2 JP57125542A JP12554282A JPS6244412B2 JP S6244412 B2 JPS6244412 B2 JP S6244412B2 JP 57125542 A JP57125542 A JP 57125542A JP 12554282 A JP12554282 A JP 12554282A JP S6244412 B2 JPS6244412 B2 JP S6244412B2
Authority
JP
Japan
Prior art keywords
silicon
single crystal
crystal silicon
oxide film
silicon oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57125542A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5916341A (ja
Inventor
Akinobu Sato
Seiji Kato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIDO KEISOKU GIJUTSU KENKYUKUMIAI
Original Assignee
JIDO KEISOKU GIJUTSU KENKYUKUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIDO KEISOKU GIJUTSU KENKYUKUMIAI filed Critical JIDO KEISOKU GIJUTSU KENKYUKUMIAI
Priority to JP57125542A priority Critical patent/JPS5916341A/ja
Publication of JPS5916341A publication Critical patent/JPS5916341A/ja
Publication of JPS6244412B2 publication Critical patent/JPS6244412B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P90/1906—
    • H10W10/061—
    • H10W10/181—
    • H10P90/191—
    • H10W10/012—
    • H10W10/13—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Weting (AREA)
JP57125542A 1982-07-19 1982-07-19 集積回路用基板の製造方法 Granted JPS5916341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57125542A JPS5916341A (ja) 1982-07-19 1982-07-19 集積回路用基板の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57125542A JPS5916341A (ja) 1982-07-19 1982-07-19 集積回路用基板の製造方法

Publications (2)

Publication Number Publication Date
JPS5916341A JPS5916341A (ja) 1984-01-27
JPS6244412B2 true JPS6244412B2 (enExample) 1987-09-21

Family

ID=14912768

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57125542A Granted JPS5916341A (ja) 1982-07-19 1982-07-19 集積回路用基板の製造方法

Country Status (1)

Country Link
JP (1) JPS5916341A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7829971B2 (en) 2007-12-14 2010-11-09 Denso Corporation Semiconductor apparatus
JP4894910B2 (ja) 2009-01-15 2012-03-14 株式会社デンソー 半導体装置の製造方法及び半導体装置並びにその半導体装置を内蔵する多層基板

Also Published As

Publication number Publication date
JPS5916341A (ja) 1984-01-27

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