JPS6243536A - リ−ク量演算記録装置 - Google Patents
リ−ク量演算記録装置Info
- Publication number
- JPS6243536A JPS6243536A JP18363485A JP18363485A JPS6243536A JP S6243536 A JPS6243536 A JP S6243536A JP 18363485 A JP18363485 A JP 18363485A JP 18363485 A JP18363485 A JP 18363485A JP S6243536 A JPS6243536 A JP S6243536A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- leak
- switch
- leakage
- calculation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims description 27
- 239000001307 helium Substances 0.000 description 5
- 229910052734 helium Inorganic materials 0.000 description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 2
- 241000270295 Serpentes Species 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18363485A JPS6243536A (ja) | 1985-08-20 | 1985-08-20 | リ−ク量演算記録装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18363485A JPS6243536A (ja) | 1985-08-20 | 1985-08-20 | リ−ク量演算記録装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6243536A true JPS6243536A (ja) | 1987-02-25 |
| JPH0224455B2 JPH0224455B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-29 |
Family
ID=16139206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18363485A Granted JPS6243536A (ja) | 1985-08-20 | 1985-08-20 | リ−ク量演算記録装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6243536A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63171882A (ja) * | 1987-09-12 | 1988-07-15 | Shunpei Yamazaki | 被膜形成方法 |
| JPS63171881A (ja) * | 1987-09-12 | 1988-07-15 | Shunpei Yamazaki | 被膜形成方法 |
| JPH05121339A (ja) * | 1992-03-26 | 1993-05-18 | Semiconductor Energy Lab Co Ltd | 被膜作製装置 |
-
1985
- 1985-08-20 JP JP18363485A patent/JPS6243536A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63171882A (ja) * | 1987-09-12 | 1988-07-15 | Shunpei Yamazaki | 被膜形成方法 |
| JPS63171881A (ja) * | 1987-09-12 | 1988-07-15 | Shunpei Yamazaki | 被膜形成方法 |
| JPH05121339A (ja) * | 1992-03-26 | 1993-05-18 | Semiconductor Energy Lab Co Ltd | 被膜作製装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0224455B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-05-29 |