JPS6243339B2 - - Google Patents

Info

Publication number
JPS6243339B2
JPS6243339B2 JP57153652A JP15365282A JPS6243339B2 JP S6243339 B2 JPS6243339 B2 JP S6243339B2 JP 57153652 A JP57153652 A JP 57153652A JP 15365282 A JP15365282 A JP 15365282A JP S6243339 B2 JPS6243339 B2 JP S6243339B2
Authority
JP
Japan
Prior art keywords
cassette
wafer storage
control rod
storage cassette
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57153652A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5943540A (ja
Inventor
Nobutoshi Ookami
Mikio Shoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP57153652A priority Critical patent/JPS5943540A/ja
Publication of JPS5943540A publication Critical patent/JPS5943540A/ja
Publication of JPS6243339B2 publication Critical patent/JPS6243339B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/50—
    • H10P72/34—

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP57153652A 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置 Granted JPS5943540A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57153652A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57153652A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Publications (2)

Publication Number Publication Date
JPS5943540A JPS5943540A (ja) 1984-03-10
JPS6243339B2 true JPS6243339B2 (OSRAM) 1987-09-12

Family

ID=15567217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57153652A Granted JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Country Status (1)

Country Link
JP (1) JPS5943540A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPH071782B2 (ja) * 1985-03-22 1995-01-11 株式会社ニコン キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Also Published As

Publication number Publication date
JPS5943540A (ja) 1984-03-10

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