JPS5943540A - ウエハ収納カセツトの搬送装置 - Google Patents

ウエハ収納カセツトの搬送装置

Info

Publication number
JPS5943540A
JPS5943540A JP57153652A JP15365282A JPS5943540A JP S5943540 A JPS5943540 A JP S5943540A JP 57153652 A JP57153652 A JP 57153652A JP 15365282 A JP15365282 A JP 15365282A JP S5943540 A JPS5943540 A JP S5943540A
Authority
JP
Japan
Prior art keywords
cassette
wafer
slanting
held
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57153652A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6243339B2 (OSRAM
Inventor
Nobutoshi Ogami
大神　信敏
Mikio Shoda
庄田　幹夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP57153652A priority Critical patent/JPS5943540A/ja
Publication of JPS5943540A publication Critical patent/JPS5943540A/ja
Publication of JPS6243339B2 publication Critical patent/JPS6243339B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/50—
    • H10P72/34—

Landscapes

  • Warehouses Or Storage Devices (AREA)
JP57153652A 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置 Granted JPS5943540A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57153652A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57153652A JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Publications (2)

Publication Number Publication Date
JPS5943540A true JPS5943540A (ja) 1984-03-10
JPS6243339B2 JPS6243339B2 (OSRAM) 1987-09-12

Family

ID=15567217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57153652A Granted JPS5943540A (ja) 1982-09-02 1982-09-02 ウエハ収納カセツトの搬送装置

Country Status (1)

Country Link
JP (1) JPS5943540A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPS61216442A (ja) * 1985-03-22 1986-09-26 Nippon Kogaku Kk <Nikon> キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59100549A (ja) * 1982-11-30 1984-06-09 Nichiden Mach Ltd ウエハ−移し替え装置
JPS61216442A (ja) * 1985-03-22 1986-09-26 Nippon Kogaku Kk <Nikon> キヤリアの搬送装置
JPS6387427A (ja) * 1986-09-29 1988-04-18 Nikon Corp 収納ケ−スの昇降装置

Also Published As

Publication number Publication date
JPS6243339B2 (OSRAM) 1987-09-12

Similar Documents

Publication Publication Date Title
TWI851779B (zh) 盒蓋打開裝置、用於無塵室設備的組件、以及用於打開和淨化晶圓盒的方法
JP7153773B2 (ja) 接合装置、接合システム、接合方法及びコンピュータ記憶媒体
JP5355451B2 (ja) 接合装置
KR970003770A (ko) 반도체 제조장치 및 이 반도체 제조장치에서 웨이퍼 카세트 내에 있는 웨이퍼의 위치 수정 방법과 웨이퍼 카세트의 이송방법
JP2004349503A (ja) 被処理体の処理システム及び処理方法
TW201342518A (zh) 真空處理裝置及真空處理裝置之運轉方法
JP4283926B2 (ja) ウエハカセットのウエハ保持システム
KR20200136841A (ko) 접합 장치 및 접합 방법
JPS5943540A (ja) ウエハ収納カセツトの搬送装置
US20110035897A1 (en) Stocker
KR20200040667A (ko) 로드 포트 및 로드 포트의 foup 덮개 이상 검지 방법
JP2016197140A (ja) 光照射装置
JP2003257945A5 (OSRAM)
TWD112955S1 (zh) 半導體晶圓輸送裝置之平台臂
CN201829472U (zh) 搭载基板的处理夹具用的收纳容器
JP2004082229A (ja) 吸着ハンド
KR101539239B1 (ko) 글래스 전용 포장 툴
TWM532314U (zh) 晶圓盒清洗裝置
JPH11255332A (ja) 基板収納ケース
JPH04172454A (ja) 防塵ケース固定レチクルまたはフォトマスク
JP3334822B2 (ja) ウエハキャリア歪み測定方法
CN220041796U (zh) 晶圆表面处理装置
JPWO2024201688A5 (OSRAM)
KR100698825B1 (ko) 기판반송장치 및 그를 이용한 방법
TW202521481A (zh) 玻璃板的製造方法及其製造裝置