JPS6240825U - - Google Patents

Info

Publication number
JPS6240825U
JPS6240825U JP13254585U JP13254585U JPS6240825U JP S6240825 U JPS6240825 U JP S6240825U JP 13254585 U JP13254585 U JP 13254585U JP 13254585 U JP13254585 U JP 13254585U JP S6240825 U JPS6240825 U JP S6240825U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
tank
processing tank
stripping apparatus
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13254585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13254585U priority Critical patent/JPS6240825U/ja
Publication of JPS6240825U publication Critical patent/JPS6240825U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP13254585U 1985-08-30 1985-08-30 Pending JPS6240825U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13254585U JPS6240825U (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13254585U JPS6240825U (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Publications (1)

Publication Number Publication Date
JPS6240825U true JPS6240825U (enrdf_load_stackoverflow) 1987-03-11

Family

ID=31032032

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13254585U Pending JPS6240825U (enrdf_load_stackoverflow) 1985-08-30 1985-08-30

Country Status (1)

Country Link
JP (1) JPS6240825U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0532842U (ja) * 1991-10-04 1993-04-30 豊生ブレーキ工業株式会社 デイスクブレーキ用キヤリパ
EP2924720A1 (en) 2014-03-24 2015-09-30 Ebara Corporation Substrate processing apparatus and resist removing unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0532842U (ja) * 1991-10-04 1993-04-30 豊生ブレーキ工業株式会社 デイスクブレーキ用キヤリパ
EP2924720A1 (en) 2014-03-24 2015-09-30 Ebara Corporation Substrate processing apparatus and resist removing unit

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