JPS6240825U - - Google Patents
Info
- Publication number
- JPS6240825U JPS6240825U JP13254585U JP13254585U JPS6240825U JP S6240825 U JPS6240825 U JP S6240825U JP 13254585 U JP13254585 U JP 13254585U JP 13254585 U JP13254585 U JP 13254585U JP S6240825 U JPS6240825 U JP S6240825U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- tank
- processing tank
- stripping apparatus
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 239000000126 substance Substances 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 238000007598 dipping method Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13254585U JPS6240825U (enrdf_load_stackoverflow) | 1985-08-30 | 1985-08-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13254585U JPS6240825U (enrdf_load_stackoverflow) | 1985-08-30 | 1985-08-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6240825U true JPS6240825U (enrdf_load_stackoverflow) | 1987-03-11 |
Family
ID=31032032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13254585U Pending JPS6240825U (enrdf_load_stackoverflow) | 1985-08-30 | 1985-08-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6240825U (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0532842U (ja) * | 1991-10-04 | 1993-04-30 | 豊生ブレーキ工業株式会社 | デイスクブレーキ用キヤリパ |
EP2924720A1 (en) | 2014-03-24 | 2015-09-30 | Ebara Corporation | Substrate processing apparatus and resist removing unit |
-
1985
- 1985-08-30 JP JP13254585U patent/JPS6240825U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0532842U (ja) * | 1991-10-04 | 1993-04-30 | 豊生ブレーキ工業株式会社 | デイスクブレーキ用キヤリパ |
EP2924720A1 (en) | 2014-03-24 | 2015-09-30 | Ebara Corporation | Substrate processing apparatus and resist removing unit |
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