JPS62126832U - - Google Patents

Info

Publication number
JPS62126832U
JPS62126832U JP1326486U JP1326486U JPS62126832U JP S62126832 U JPS62126832 U JP S62126832U JP 1326486 U JP1326486 U JP 1326486U JP 1326486 U JP1326486 U JP 1326486U JP S62126832 U JPS62126832 U JP S62126832U
Authority
JP
Japan
Prior art keywords
ultraviolet
cleaning
cleaned
irradiation means
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1326486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1326486U priority Critical patent/JPS62126832U/ja
Publication of JPS62126832U publication Critical patent/JPS62126832U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Drying Of Semiconductors (AREA)
JP1326486U 1986-02-03 1986-02-03 Pending JPS62126832U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1326486U JPS62126832U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1326486U JPS62126832U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Publications (1)

Publication Number Publication Date
JPS62126832U true JPS62126832U (enrdf_load_stackoverflow) 1987-08-12

Family

ID=30802158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1326486U Pending JPS62126832U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Country Status (1)

Country Link
JP (1) JPS62126832U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6333824A (ja) * 1986-07-28 1988-02-13 Dainippon Screen Mfg Co Ltd 表面洗浄方法
JPH078928A (ja) * 1993-06-14 1995-01-13 Internatl Business Mach Corp <Ibm> 改良されたエアロゾル洗浄装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6333824A (ja) * 1986-07-28 1988-02-13 Dainippon Screen Mfg Co Ltd 表面洗浄方法
JPH078928A (ja) * 1993-06-14 1995-01-13 Internatl Business Mach Corp <Ibm> 改良されたエアロゾル洗浄装置

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