JPS61173133U - - Google Patents

Info

Publication number
JPS61173133U
JPS61173133U JP5722185U JP5722185U JPS61173133U JP S61173133 U JPS61173133 U JP S61173133U JP 5722185 U JP5722185 U JP 5722185U JP 5722185 U JP5722185 U JP 5722185U JP S61173133 U JPS61173133 U JP S61173133U
Authority
JP
Japan
Prior art keywords
susceptor
insulating film
semiconductor manufacturing
etching
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5722185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0322911Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985057221U priority Critical patent/JPH0322911Y2/ja
Publication of JPS61173133U publication Critical patent/JPS61173133U/ja
Application granted granted Critical
Publication of JPH0322911Y2 publication Critical patent/JPH0322911Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1985057221U 1985-04-16 1985-04-16 Expired JPH0322911Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985057221U JPH0322911Y2 (enrdf_load_stackoverflow) 1985-04-16 1985-04-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985057221U JPH0322911Y2 (enrdf_load_stackoverflow) 1985-04-16 1985-04-16

Publications (2)

Publication Number Publication Date
JPS61173133U true JPS61173133U (enrdf_load_stackoverflow) 1986-10-28
JPH0322911Y2 JPH0322911Y2 (enrdf_load_stackoverflow) 1991-05-20

Family

ID=30581547

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985057221U Expired JPH0322911Y2 (enrdf_load_stackoverflow) 1985-04-16 1985-04-16

Country Status (1)

Country Link
JP (1) JPH0322911Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus
JPS5834913A (ja) * 1981-08-27 1983-03-01 Mitsubishi Electric Corp ウエ−ハ支持具の清浄化方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus
JPS5834913A (ja) * 1981-08-27 1983-03-01 Mitsubishi Electric Corp ウエ−ハ支持具の清浄化方法

Also Published As

Publication number Publication date
JPH0322911Y2 (enrdf_load_stackoverflow) 1991-05-20

Similar Documents

Publication Publication Date Title
GB2302452A (en) Resistor fabrication
JPS61158969U (enrdf_load_stackoverflow)
JPS61173133U (enrdf_load_stackoverflow)
JPS6232533U (enrdf_load_stackoverflow)
JPS6240825U (enrdf_load_stackoverflow)
JPS63134544U (enrdf_load_stackoverflow)
JPH01129824U (enrdf_load_stackoverflow)
JPS61161288U (enrdf_load_stackoverflow)
JPS61125045U (enrdf_load_stackoverflow)
JPS6332689U (enrdf_load_stackoverflow)
JPH03101951U (enrdf_load_stackoverflow)
JPS62101230U (enrdf_load_stackoverflow)
JPH0325234U (enrdf_load_stackoverflow)
JPS6367243U (enrdf_load_stackoverflow)
JPS6426836U (enrdf_load_stackoverflow)
JPS6322732U (enrdf_load_stackoverflow)
JPH0211326U (enrdf_load_stackoverflow)
JPH02132941U (enrdf_load_stackoverflow)
JPS62157148U (enrdf_load_stackoverflow)
JPS62120341U (enrdf_load_stackoverflow)
JPS6433743U (enrdf_load_stackoverflow)
JPS6195736U (enrdf_load_stackoverflow)
JPS645445U (enrdf_load_stackoverflow)
JPH0187535U (enrdf_load_stackoverflow)
JPS62180947U (enrdf_load_stackoverflow)