JPS6240375A - 硬質カ−ボン膜 - Google Patents

硬質カ−ボン膜

Info

Publication number
JPS6240375A
JPS6240375A JP60179025A JP17902585A JPS6240375A JP S6240375 A JPS6240375 A JP S6240375A JP 60179025 A JP60179025 A JP 60179025A JP 17902585 A JP17902585 A JP 17902585A JP S6240375 A JPS6240375 A JP S6240375A
Authority
JP
Japan
Prior art keywords
carbon film
hard carbon
film
plasma cvd
cvd method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60179025A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510426B2 (en:Method
Inventor
Kenji Yamamoto
憲治 山本
Takehisa Nakayama
中山　威久
Yoshihisa Owada
善久 太和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP60179025A priority Critical patent/JPS6240375A/ja
Publication of JPS6240375A publication Critical patent/JPS6240375A/ja
Publication of JPH0510426B2 publication Critical patent/JPH0510426B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP60179025A 1985-08-14 1985-08-14 硬質カ−ボン膜 Granted JPS6240375A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60179025A JPS6240375A (ja) 1985-08-14 1985-08-14 硬質カ−ボン膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60179025A JPS6240375A (ja) 1985-08-14 1985-08-14 硬質カ−ボン膜

Publications (2)

Publication Number Publication Date
JPS6240375A true JPS6240375A (ja) 1987-02-21
JPH0510426B2 JPH0510426B2 (en:Method) 1993-02-09

Family

ID=16058796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60179025A Granted JPS6240375A (ja) 1985-08-14 1985-08-14 硬質カ−ボン膜

Country Status (1)

Country Link
JP (1) JPS6240375A (en:Method)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5275850A (en) * 1988-04-20 1994-01-04 Hitachi, Ltd. Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias
JPH0649645A (ja) * 1992-07-31 1994-02-22 Yoshida Kogyo Kk <Ykk> 硬質多層膜形成体およびその製造方法
GB2338716A (en) * 1998-06-26 1999-12-29 Mclaughlin James A RF plasma enhanced CVD where the substrate acts as a cathode
JP2007320142A (ja) * 2006-05-31 2007-12-13 Meisho Kiko Kk ナノインプリント用モールド
JP2022023933A (ja) * 2017-06-08 2022-02-08 アプライド マテリアルズ インコーポレイテッド ハードマスク及びその他のパターニング応用のための高密度低温炭素膜

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145375A (ja) * 1984-01-09 1985-07-31 Nippon Telegr & Teleph Corp <Ntt> Νｂ膜表面の不動態化処理方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145375A (ja) * 1984-01-09 1985-07-31 Nippon Telegr & Teleph Corp <Ntt> Νｂ膜表面の不動態化処理方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5275850A (en) * 1988-04-20 1994-01-04 Hitachi, Ltd. Process for producing a magnetic disk having a metal containing hard carbon coating by plasma chemical vapor deposition under a negative self bias
JPH0649645A (ja) * 1992-07-31 1994-02-22 Yoshida Kogyo Kk <Ykk> 硬質多層膜形成体およびその製造方法
GB2338716A (en) * 1998-06-26 1999-12-29 Mclaughlin James A RF plasma enhanced CVD where the substrate acts as a cathode
GB2338716B (en) * 1998-06-26 2003-04-02 Mclaughlin James A An apparatus and a method for coating diamond like carbon (DLC) or other vacuum depositable coatings onto a substrate
JP2007320142A (ja) * 2006-05-31 2007-12-13 Meisho Kiko Kk ナノインプリント用モールド
JP2022023933A (ja) * 2017-06-08 2022-02-08 アプライド マテリアルズ インコーポレイテッド ハードマスク及びその他のパターニング応用のための高密度低温炭素膜
JP2023134494A (ja) * 2017-06-08 2023-09-27 アプライド マテリアルズ インコーポレイテッド ハードマスク及びその他のパターニング応用のための高密度低温炭素膜

Also Published As

Publication number Publication date
JPH0510426B2 (en:Method) 1993-02-09

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