JPS6236400B2 - - Google Patents
Info
- Publication number
- JPS6236400B2 JPS6236400B2 JP56178759A JP17875981A JPS6236400B2 JP S6236400 B2 JPS6236400 B2 JP S6236400B2 JP 56178759 A JP56178759 A JP 56178759A JP 17875981 A JP17875981 A JP 17875981A JP S6236400 B2 JPS6236400 B2 JP S6236400B2
- Authority
- JP
- Japan
- Prior art keywords
- active layer
- region
- electrode
- gate electrode
- field effect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/80—FETs having rectifying junction gate electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions
- H10D64/23—Electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. sources, drains, anodes or cathodes
- H10D64/251—Source or drain electrodes for field-effect devices
- H10D64/256—Source or drain electrodes for field-effect devices for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies
- H10D64/2565—Source or drain electrodes for field-effect devices for lateral devices wherein the source or drain electrodes are recessed in semiconductor bodies wherein the source or drain regions are on a top side of the semiconductor bodies and the recessed source or drain electrodes are on a bottom side of the semiconductor bodies
Landscapes
- Electrodes Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56178759A JPS5879773A (ja) | 1981-11-06 | 1981-11-06 | 電界効果トランジスタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56178759A JPS5879773A (ja) | 1981-11-06 | 1981-11-06 | 電界効果トランジスタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5879773A JPS5879773A (ja) | 1983-05-13 |
JPS6236400B2 true JPS6236400B2 (enrdf_load_stackoverflow) | 1987-08-06 |
Family
ID=16054099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56178759A Granted JPS5879773A (ja) | 1981-11-06 | 1981-11-06 | 電界効果トランジスタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5879773A (enrdf_load_stackoverflow) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60161651A (ja) * | 1984-02-02 | 1985-08-23 | Mitsubishi Electric Corp | 半導体装置の製造方法 |
JPH0797572B2 (ja) * | 1985-07-08 | 1995-10-18 | 株式会社日立製作所 | 半導体集積回路基板内スル−ホ−ルの形成方法 |
US5236854A (en) * | 1989-12-11 | 1993-08-17 | Yukio Higaki | Compound semiconductor device and method for fabrication thereof |
JPH06232180A (ja) * | 1993-02-05 | 1994-08-19 | Nec Corp | 半導体装置 |
US6611002B2 (en) * | 2001-02-23 | 2003-08-26 | Nitronex Corporation | Gallium nitride material devices and methods including backside vias |
JP5386987B2 (ja) * | 2007-02-07 | 2014-01-15 | 日本電気株式会社 | 半導体装置 |
JP5383652B2 (ja) * | 2008-03-04 | 2014-01-08 | ルネサスエレクトロニクス株式会社 | 電界効果トランジスタ及びその製造方法 |
US9960127B2 (en) | 2016-05-18 | 2018-05-01 | Macom Technology Solutions Holdings, Inc. | High-power amplifier package |
US10134658B2 (en) | 2016-08-10 | 2018-11-20 | Macom Technology Solutions Holdings, Inc. | High power transistors |
-
1981
- 1981-11-06 JP JP56178759A patent/JPS5879773A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5879773A (ja) | 1983-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4213840A (en) | Low-resistance, fine-line semiconductor device and the method for its manufacture | |
US5236854A (en) | Compound semiconductor device and method for fabrication thereof | |
JPH0354464B2 (enrdf_load_stackoverflow) | ||
US4425573A (en) | Metal-semiconductor-field effect transistor (MESFET) with lightly doped drain contact region for higher voltage breakdown | |
US3951708A (en) | Method of manufacturing a semiconductor device | |
JPS6236400B2 (enrdf_load_stackoverflow) | ||
JPH0324061B2 (enrdf_load_stackoverflow) | ||
US20030173584A1 (en) | Semiconductor integrated circuit device and method of fabricating the same | |
US4695869A (en) | GAAS semiconductor device | |
US4212022A (en) | Field effect transistor with gate and drain electrodes on the side surface of a mesa | |
US20050179106A1 (en) | Schottky barrier diode | |
US4801987A (en) | Junction type field effect transistor with metallized oxide film | |
US5483089A (en) | Electrically isolated MESFET | |
EP0432948A2 (en) | Compound semiconductor device and production method thereof | |
US4784967A (en) | Method for fabricating a field-effect transistor with a self-aligned gate | |
JPH09121054A (ja) | 半導体デバイスおよびその製造方法 | |
JP3281204B2 (ja) | 配線構造及びそのバイヤホール形成方法 | |
JPH0684967A (ja) | 半導体装置 | |
JPH07273316A (ja) | 半導体装置 | |
EP0146212A1 (en) | Schottky barrier diode and method of manufacturing it | |
JPH05275456A (ja) | 半導体装置及びその製造方法 | |
JP2707576B2 (ja) | 半導体装置 | |
JPS6161549B2 (enrdf_load_stackoverflow) | ||
JPH0491441A (ja) | 電界効果トランジスタの製造方法 | |
JPH10233486A (ja) | 半導体装置及びその製造方法 |