JPS6236395B2 - - Google Patents
Info
- Publication number
- JPS6236395B2 JPS6236395B2 JP13053678A JP13053678A JPS6236395B2 JP S6236395 B2 JPS6236395 B2 JP S6236395B2 JP 13053678 A JP13053678 A JP 13053678A JP 13053678 A JP13053678 A JP 13053678A JP S6236395 B2 JPS6236395 B2 JP S6236395B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- polysilicon layer
- insulating film
- contacts
- capacitor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 26
- 239000003990 capacitor Substances 0.000 claims description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 12
- 229920005591 polysilicon Polymers 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 230000003071 parasitic effect Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000009792 diffusion process Methods 0.000 description 6
- 230000010355 oscillation Effects 0.000 description 6
- 239000013078 crystal Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13053678A JPS5558561A (en) | 1978-10-25 | 1978-10-25 | Semiconductor capacitance element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13053678A JPS5558561A (en) | 1978-10-25 | 1978-10-25 | Semiconductor capacitance element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5558561A JPS5558561A (en) | 1980-05-01 |
| JPS6236395B2 true JPS6236395B2 (enrdf_load_stackoverflow) | 1987-08-06 |
Family
ID=15036630
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13053678A Granted JPS5558561A (en) | 1978-10-25 | 1978-10-25 | Semiconductor capacitance element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5558561A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5850767A (ja) * | 1981-09-21 | 1983-03-25 | Hitachi Ltd | 半導体装置 |
| JPS58159367A (ja) * | 1982-03-17 | 1983-09-21 | Matsushita Electronics Corp | Ｍｏｓ容量装置 |
| JPS58210668A (ja) * | 1982-05-31 | 1983-12-07 | Matsushita Electric Ind Co Ltd | 半導体集積回路 |
| JPS5931049A (ja) * | 1982-08-13 | 1984-02-18 | Mitsubishi Electric Corp | 半導体集積回路装置 |
| CA1310078C (en) * | 1987-11-27 | 1992-11-10 | American Telephone And Telegraph Company | Voltage controlled variable capacitor |
| US6410954B1 (en) | 2000-04-10 | 2002-06-25 | Koninklijke Philips Electronics N.V. | Multilayered capacitor structure with alternately connected concentric lines for deep sub-micron CMOS |
-
1978
- 1978-10-25 JP JP13053678A patent/JPS5558561A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5558561A (en) | 1980-05-01 |
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