JPS6236282Y2 - - Google Patents
Info
- Publication number
- JPS6236282Y2 JPS6236282Y2 JP1982021128U JP2112882U JPS6236282Y2 JP S6236282 Y2 JPS6236282 Y2 JP S6236282Y2 JP 1982021128 U JP1982021128 U JP 1982021128U JP 2112882 U JP2112882 U JP 2112882U JP S6236282 Y2 JPS6236282 Y2 JP S6236282Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- temperature
- semiconductor
- sensor circuit
- tester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 57
- 239000000523 sample Substances 0.000 claims description 12
- 238000012360 testing method Methods 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 42
- 230000014759 maintenance of location Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000009529 body temperature measurement Methods 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2112882U JPS58124949U (ja) | 1982-02-17 | 1982-02-17 | 半導体ウエハ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2112882U JPS58124949U (ja) | 1982-02-17 | 1982-02-17 | 半導体ウエハ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58124949U JPS58124949U (ja) | 1983-08-25 |
| JPS6236282Y2 true JPS6236282Y2 (ru) | 1987-09-16 |
Family
ID=30033259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2112882U Granted JPS58124949U (ja) | 1982-02-17 | 1982-02-17 | 半導体ウエハ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58124949U (ru) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5387669A (en) * | 1977-01-12 | 1978-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Inspecting system for integrated circuit device |
| JPS5497376A (en) * | 1978-01-18 | 1979-08-01 | Matsushita Electric Ind Co Ltd | Inspection method semiconductor device |
| JPS57102009A (en) * | 1980-12-17 | 1982-06-24 | Nec Corp | Semiconductor device |
-
1982
- 1982-02-17 JP JP2112882U patent/JPS58124949U/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5387669A (en) * | 1977-01-12 | 1978-08-02 | Nippon Telegr & Teleph Corp <Ntt> | Inspecting system for integrated circuit device |
| JPS5497376A (en) * | 1978-01-18 | 1979-08-01 | Matsushita Electric Ind Co Ltd | Inspection method semiconductor device |
| JPS57102009A (en) * | 1980-12-17 | 1982-06-24 | Nec Corp | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58124949U (ja) | 1983-08-25 |
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