JPS5387669A - Inspecting system for integrated circuit device - Google Patents
Inspecting system for integrated circuit deviceInfo
- Publication number
- JPS5387669A JPS5387669A JP223877A JP223877A JPS5387669A JP S5387669 A JPS5387669 A JP S5387669A JP 223877 A JP223877 A JP 223877A JP 223877 A JP223877 A JP 223877A JP S5387669 A JPS5387669 A JP S5387669A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- circuit device
- inspecting system
- inspecting
- goodness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To judge the goodness or not of functions by two-dimensionally analyzing the heat released from an element under operation.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP223877A JPS5387669A (en) | 1977-01-12 | 1977-01-12 | Inspecting system for integrated circuit device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP223877A JPS5387669A (en) | 1977-01-12 | 1977-01-12 | Inspecting system for integrated circuit device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5387669A true JPS5387669A (en) | 1978-08-02 |
JPS5423227B2 JPS5423227B2 (en) | 1979-08-11 |
Family
ID=11523766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP223877A Granted JPS5387669A (en) | 1977-01-12 | 1977-01-12 | Inspecting system for integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5387669A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58124949U (en) * | 1982-02-17 | 1983-08-25 | 日本電気株式会社 | semiconductor wafer |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4910096A (en) * | 1972-05-25 | 1974-01-29 | ||
JPS49100976A (en) * | 1973-01-30 | 1974-09-24 |
-
1977
- 1977-01-12 JP JP223877A patent/JPS5387669A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4910096A (en) * | 1972-05-25 | 1974-01-29 | ||
JPS49100976A (en) * | 1973-01-30 | 1974-09-24 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58124949U (en) * | 1982-02-17 | 1983-08-25 | 日本電気株式会社 | semiconductor wafer |
JPS6236282Y2 (en) * | 1982-02-17 | 1987-09-16 |
Also Published As
Publication number | Publication date |
---|---|
JPS5423227B2 (en) | 1979-08-11 |
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