JPS5387669A - Inspecting system for integrated circuit device - Google Patents

Inspecting system for integrated circuit device

Info

Publication number
JPS5387669A
JPS5387669A JP223877A JP223877A JPS5387669A JP S5387669 A JPS5387669 A JP S5387669A JP 223877 A JP223877 A JP 223877A JP 223877 A JP223877 A JP 223877A JP S5387669 A JPS5387669 A JP S5387669A
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit device
inspecting system
inspecting
goodness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP223877A
Other languages
Japanese (ja)
Other versions
JPS5423227B2 (en
Inventor
Yasushi Wada
Junji Inoue
Keisuke Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP223877A priority Critical patent/JPS5387669A/en
Publication of JPS5387669A publication Critical patent/JPS5387669A/en
Publication of JPS5423227B2 publication Critical patent/JPS5423227B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To judge the goodness or not of functions by two-dimensionally analyzing the heat released from an element under operation.
COPYRIGHT: (C)1978,JPO&Japio
JP223877A 1977-01-12 1977-01-12 Inspecting system for integrated circuit device Granted JPS5387669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP223877A JPS5387669A (en) 1977-01-12 1977-01-12 Inspecting system for integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP223877A JPS5387669A (en) 1977-01-12 1977-01-12 Inspecting system for integrated circuit device

Publications (2)

Publication Number Publication Date
JPS5387669A true JPS5387669A (en) 1978-08-02
JPS5423227B2 JPS5423227B2 (en) 1979-08-11

Family

ID=11523766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP223877A Granted JPS5387669A (en) 1977-01-12 1977-01-12 Inspecting system for integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5387669A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124949U (en) * 1982-02-17 1983-08-25 日本電気株式会社 semiconductor wafer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910096A (en) * 1972-05-25 1974-01-29
JPS49100976A (en) * 1973-01-30 1974-09-24

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4910096A (en) * 1972-05-25 1974-01-29
JPS49100976A (en) * 1973-01-30 1974-09-24

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58124949U (en) * 1982-02-17 1983-08-25 日本電気株式会社 semiconductor wafer
JPS6236282Y2 (en) * 1982-02-17 1987-09-16

Also Published As

Publication number Publication date
JPS5423227B2 (en) 1979-08-11

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