JPS6235807B2 - - Google Patents

Info

Publication number
JPS6235807B2
JPS6235807B2 JP10732878A JP10732878A JPS6235807B2 JP S6235807 B2 JPS6235807 B2 JP S6235807B2 JP 10732878 A JP10732878 A JP 10732878A JP 10732878 A JP10732878 A JP 10732878A JP S6235807 B2 JPS6235807 B2 JP S6235807B2
Authority
JP
Japan
Prior art keywords
pump
reduced pressure
gas
reactor
pumps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10732878A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5534158A (en
Inventor
Akira Kojima
Hisayoshi Yamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP10732878A priority Critical patent/JPS5534158A/ja
Publication of JPS5534158A publication Critical patent/JPS5534158A/ja
Publication of JPS6235807B2 publication Critical patent/JPS6235807B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/002—Component parts of these vessels not mentioned in B01J3/004, B01J3/006, B01J3/02 - B01J3/08; Measures taken in conjunction with the process to be carried out, e.g. safety measures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Chemical Vapour Deposition (AREA)
JP10732878A 1978-09-01 1978-09-01 Vacuum reaction apparatus Granted JPS5534158A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10732878A JPS5534158A (en) 1978-09-01 1978-09-01 Vacuum reaction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10732878A JPS5534158A (en) 1978-09-01 1978-09-01 Vacuum reaction apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59047651A Division JPS59197141A (ja) 1984-03-13 1984-03-13 減圧反応装置に於ける排気処理方法

Publications (2)

Publication Number Publication Date
JPS5534158A JPS5534158A (en) 1980-03-10
JPS6235807B2 true JPS6235807B2 (enrdf_load_stackoverflow) 1987-08-04

Family

ID=14456259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10732878A Granted JPS5534158A (en) 1978-09-01 1978-09-01 Vacuum reaction apparatus

Country Status (1)

Country Link
JP (1) JPS5534158A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57162326A (en) * 1981-03-30 1982-10-06 Fujitsu Ltd Vapor phase growing device
JPS58209113A (ja) * 1982-05-31 1983-12-06 Semiconductor Energy Lab Co Ltd 半導体用反応性気体精製方法
JPS5943519A (ja) * 1982-09-03 1984-03-10 Ulvac Corp プラズマｃｖｄ装置における排気系装置
JPS59197141A (ja) * 1984-03-13 1984-11-08 Sony Corp 減圧反応装置に於ける排気処理方法
JPH0722124B2 (ja) * 1984-10-17 1995-03-08 東芝セラミツクス株式会社 Ｃｖｄ炉用排ガス装置
JPH0715131Y2 (ja) * 1989-01-20 1995-04-10 古河電気工業株式会社 有機金属気相成長装置
JP2952795B2 (ja) * 1991-12-24 1999-09-27 三菱電機株式会社 半導体装置の製造方法及び半導体製造装置のパージ方法
JP3801286B2 (ja) * 1997-02-03 2006-07-26 三菱重工業株式会社 安全装置
GB0505852D0 (en) * 2005-03-22 2005-04-27 Boc Group Plc Method of treating a gas stream
GB0513867D0 (en) * 2005-07-06 2005-08-10 Boc Group Plc Method of treating an exhaust gas

Also Published As

Publication number Publication date
JPS5534158A (en) 1980-03-10

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