JPS6234440Y2 - - Google Patents
Info
- Publication number
- JPS6234440Y2 JPS6234440Y2 JP1982045003U JP4500382U JPS6234440Y2 JP S6234440 Y2 JPS6234440 Y2 JP S6234440Y2 JP 1982045003 U JP1982045003 U JP 1982045003U JP 4500382 U JP4500382 U JP 4500382U JP S6234440 Y2 JPS6234440 Y2 JP S6234440Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- substrate
- transport path
- transport
- conveyance path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 26
- 230000032258 transport Effects 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011086 high cleaning Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000006163 transport media Substances 0.000 description 1
Landscapes
- Delivering By Means Of Belts And Rollers (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Pusher Or Impeller Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4500382U JPS58147246U (ja) | 1982-03-30 | 1982-03-30 | 基板の液体搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4500382U JPS58147246U (ja) | 1982-03-30 | 1982-03-30 | 基板の液体搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58147246U JPS58147246U (ja) | 1983-10-03 |
| JPS6234440Y2 true JPS6234440Y2 (zh) | 1987-09-02 |
Family
ID=30056044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4500382U Granted JPS58147246U (ja) | 1982-03-30 | 1982-03-30 | 基板の液体搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58147246U (zh) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079897B2 (ja) * | 1988-05-17 | 1995-02-01 | 信越半導体株式会社 | ウェーハ自動洗浄装置 |
| JP2504916B2 (ja) * | 1993-09-20 | 1996-06-05 | 株式会社芝浦製作所 | 基板洗浄装置 |
| JP4510241B2 (ja) * | 2000-06-30 | 2010-07-21 | 不二越機械工業株式会社 | ウェーハの収納装置 |
| JP4594241B2 (ja) * | 2006-01-06 | 2010-12-08 | 東京エレクトロン株式会社 | 基板搬送装置、基板搬送方法及びコンピュータプログラム |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285461A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Continuous treating apparatus for plate form objects |
| JPS5588888A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Treating device |
-
1982
- 1982-03-30 JP JP4500382U patent/JPS58147246U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285461A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Continuous treating apparatus for plate form objects |
| JPS5588888A (en) * | 1978-12-27 | 1980-07-04 | Hitachi Ltd | Treating device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58147246U (ja) | 1983-10-03 |
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