JPS6234131B2 - - Google Patents

Info

Publication number
JPS6234131B2
JPS6234131B2 JP54171183A JP17118379A JPS6234131B2 JP S6234131 B2 JPS6234131 B2 JP S6234131B2 JP 54171183 A JP54171183 A JP 54171183A JP 17118379 A JP17118379 A JP 17118379A JP S6234131 B2 JPS6234131 B2 JP S6234131B2
Authority
JP
Japan
Prior art keywords
laser
laser beam
mask
chip
annealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54171183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5696835A (en
Inventor
Haruhisa Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP17118379A priority Critical patent/JPS5696835A/ja
Publication of JPS5696835A publication Critical patent/JPS5696835A/ja
Publication of JPS6234131B2 publication Critical patent/JPS6234131B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing

Landscapes

  • Recrystallisation Techniques (AREA)
JP17118379A 1979-12-29 1979-12-29 Manufacture of semiconductor device Granted JPS5696835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17118379A JPS5696835A (en) 1979-12-29 1979-12-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17118379A JPS5696835A (en) 1979-12-29 1979-12-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5696835A JPS5696835A (en) 1981-08-05
JPS6234131B2 true JPS6234131B2 (enExample) 1987-07-24

Family

ID=15918535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17118379A Granted JPS5696835A (en) 1979-12-29 1979-12-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5696835A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012503311A (ja) * 2008-09-17 2012-02-02 アプライド マテリアルズ インコーポレイテッド 基板のアニールにおける熱量の管理

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7772090B2 (en) 2003-09-30 2010-08-10 Intel Corporation Methods for laser scribing wafers
WO2007103643A2 (en) * 2006-03-08 2007-09-13 Applied Materials, Inc. Method and apparatus for thermal processing structures formed on a substrate
US7569463B2 (en) * 2006-03-08 2009-08-04 Applied Materials, Inc. Method of thermal processing structures formed on a substrate
JP5503876B2 (ja) * 2008-01-24 2014-05-28 株式会社半導体エネルギー研究所 半導体基板の製造方法
JP2010245316A (ja) * 2009-04-07 2010-10-28 Sumco Corp エピタキシャルウェーハの製造方法
US8501638B1 (en) * 2012-04-27 2013-08-06 Ultratech, Inc. Laser annealing scanning methods with reduced annealing non-uniformities
CN106098599B (zh) * 2016-08-17 2020-04-21 京东方科技集团股份有限公司 一种激光退火装置及其控制方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012503311A (ja) * 2008-09-17 2012-02-02 アプライド マテリアルズ インコーポレイテッド 基板のアニールにおける熱量の管理

Also Published As

Publication number Publication date
JPS5696835A (en) 1981-08-05

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