JPS6233316Y2 - - Google Patents
Info
- Publication number
- JPS6233316Y2 JPS6233316Y2 JP13477583U JP13477583U JPS6233316Y2 JP S6233316 Y2 JPS6233316 Y2 JP S6233316Y2 JP 13477583 U JP13477583 U JP 13477583U JP 13477583 U JP13477583 U JP 13477583U JP S6233316 Y2 JPS6233316 Y2 JP S6233316Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- casing
- drying device
- blades
- semiconductor material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 17
- 238000001035 drying Methods 0.000 claims description 13
- 230000002093 peripheral effect Effects 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 12
- 238000005452 bending Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13477583U JPS6042732U (ja) | 1983-08-31 | 1983-08-31 | 半導体材料の水切乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13477583U JPS6042732U (ja) | 1983-08-31 | 1983-08-31 | 半導体材料の水切乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6042732U JPS6042732U (ja) | 1985-03-26 |
| JPS6233316Y2 true JPS6233316Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-26 |
Family
ID=30303580
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13477583U Granted JPS6042732U (ja) | 1983-08-31 | 1983-08-31 | 半導体材料の水切乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042732U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085630A (ja) * | 2005-09-21 | 2007-04-05 | Kida Seiko Kk | 表面処理済みワークの乾燥装置 |
-
1983
- 1983-08-31 JP JP13477583U patent/JPS6042732U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6042732U (ja) | 1985-03-26 |