JPS623019A - 四弗化チタンの製造方法 - Google Patents

Info

Publication number

JPS623019A

JPS623019A JP14013085A JP14013085A JPS623019A JP S623019 A JPS623019 A JP S623019A JP 14013085 A JP14013085 A JP 14013085A JP 14013085 A JP14013085 A JP 14013085A JP S623019 A JPS623019 A JP S623019A

Authority

JP

Japan

Prior art keywords

titanium

gas

tetrafluoride

titanium tetrafluoride

tif4

Prior art date

1985-06-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• XROWMBWRMNHXMF-UHFFFAOYSA-J titanium tetrafluoride Chemical compound [F-].[F-].[F-].[F-].[Ti+4] XROWMBWRMNHXMF-UHFFFAOYSA-J 0.000 title claims abstract description 38
• 238000004519 manufacturing process Methods 0.000 title claims description 4
• RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 22
• 239000010936 titanium Substances 0.000 claims abstract description 22
• 229910052719 titanium Inorganic materials 0.000 claims abstract description 22
• QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims abstract description 16
• 239000007789 gas Substances 0.000 abstract description 20
• 239000007787 solid Substances 0.000 abstract description 5
• 238000000859 sublimation Methods 0.000 abstract description 5
• 230000008022 sublimation Effects 0.000 abstract description 5
• 238000001816 cooling Methods 0.000 abstract description 4
• GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 abstract 2
• -1 sponge titanium Chemical compound 0.000 abstract 1
• 238000000034 method Methods 0.000 description 12
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
• 229910052751 metal Inorganic materials 0.000 description 5
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
• 239000012535 impurity Substances 0.000 description 4
• 238000002844 melting Methods 0.000 description 4
• 230000008018 melting Effects 0.000 description 4
• 239000002184 metal Substances 0.000 description 4
• 229910052757 nitrogen Inorganic materials 0.000 description 4
• YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
• 150000001875 compounds Chemical class 0.000 description 2
• 239000011737 fluorine Substances 0.000 description 2
• 229910052731 fluorine Inorganic materials 0.000 description 2
• 239000001307 helium Substances 0.000 description 2
• 229910052734 helium Inorganic materials 0.000 description 2
• SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
• 239000011261 inert gas Substances 0.000 description 2
• 229910052742 iron Inorganic materials 0.000 description 2
• 229910052749 magnesium Inorganic materials 0.000 description 2
• 239000011777 magnesium Substances 0.000 description 2
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
• 229910001512 metal fluoride Inorganic materials 0.000 description 2
• 238000013021 overheating Methods 0.000 description 2
• 239000002994 raw material Substances 0.000 description 2
• KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
• 239000007795 chemical reaction product Substances 0.000 description 1
• 238000005229 chemical vapour deposition Methods 0.000 description 1
• CTNMMTCXUUFYAP-UHFFFAOYSA-L difluoromanganese Chemical compound F[Mn]F CTNMMTCXUUFYAP-UHFFFAOYSA-L 0.000 description 1
• 238000007865 diluting Methods 0.000 description 1
• 229910001873 dinitrogen Inorganic materials 0.000 description 1
• 238000004821 distillation Methods 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000000921 elemental analysis Methods 0.000 description 1
• 239000012025 fluorinating agent Substances 0.000 description 1
• 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
• 230000002401 inhibitory effect Effects 0.000 description 1
• FZGIHSNZYGFUGM-UHFFFAOYSA-L iron(ii) fluoride Chemical compound [F-].[F-].[Fe+2] FZGIHSNZYGFUGM-UHFFFAOYSA-L 0.000 description 1
• SHXXPRJOPFJRHA-UHFFFAOYSA-K iron(iii) fluoride Chemical compound F[Fe](F)F SHXXPRJOPFJRHA-UHFFFAOYSA-K 0.000 description 1
• ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 150000002739 metals Chemical class 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• 238000000746 purification Methods 0.000 description 1
• 230000009257 reactivity Effects 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 238000004381 surface treatment Methods 0.000 description 1
• XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
• NLPMQGKZYAYAFE-UHFFFAOYSA-K titanium(iii) fluoride Chemical compound F[Ti](F)F NLPMQGKZYAYAFE-UHFFFAOYSA-K 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1