JPS62297467A - 炭化ケイ素被膜形成方法 - Google Patents

炭化ケイ素被膜形成方法

Info

Publication number
JPS62297467A
JPS62297467A JP61140385A JP14038586A JPS62297467A JP S62297467 A JPS62297467 A JP S62297467A JP 61140385 A JP61140385 A JP 61140385A JP 14038586 A JP14038586 A JP 14038586A JP S62297467 A JPS62297467 A JP S62297467A
Authority
JP
Japan
Prior art keywords
silicon carbide
reaction
chamber
film
oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61140385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0425347B2 (enExample
Inventor
Mamoru Maeda
守 前田
Yuji Furumura
雄二 古村
Tadashi Murata
村田　正
Masaki Okada
雅樹 岡田
Akira Nogami
野上　曉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Fujitsu Ltd
Original Assignee
Toyo Tanso Co Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd, Fujitsu Ltd filed Critical Toyo Tanso Co Ltd
Priority to JP61140385A priority Critical patent/JPS62297467A/ja
Publication of JPS62297467A publication Critical patent/JPS62297467A/ja
Publication of JPH0425347B2 publication Critical patent/JPH0425347B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP61140385A 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法 Granted JPS62297467A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61140385A JPS62297467A (ja) 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61140385A JPS62297467A (ja) 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法

Publications (2)

Publication Number Publication Date
JPS62297467A true JPS62297467A (ja) 1987-12-24
JPH0425347B2 JPH0425347B2 (enExample) 1992-04-30

Family

ID=15267581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61140385A Granted JPS62297467A (ja) 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法

Country Status (1)

Country Link
JP (1) JPS62297467A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01249679A (ja) * 1988-03-29 1989-10-04 Toyo Tanso Kk 黒鉛一炭化珪素複合体並びにその製造法
US5041305A (en) * 1989-05-04 1991-08-20 The British Petroleum Company P.L.C. Process for depositing a silicon carbide coating on a filament

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01249679A (ja) * 1988-03-29 1989-10-04 Toyo Tanso Kk 黒鉛一炭化珪素複合体並びにその製造法
US5041305A (en) * 1989-05-04 1991-08-20 The British Petroleum Company P.L.C. Process for depositing a silicon carbide coating on a filament

Also Published As

Publication number Publication date
JPH0425347B2 (enExample) 1992-04-30

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