JPS62292693A - 液相エピタキシャル成長方法 - Google Patents

液相エピタキシャル成長方法

Info

Publication number
JPS62292693A
JPS62292693A JP13492686A JP13492686A JPS62292693A JP S62292693 A JPS62292693 A JP S62292693A JP 13492686 A JP13492686 A JP 13492686A JP 13492686 A JP13492686 A JP 13492686A JP S62292693 A JPS62292693 A JP S62292693A
Authority
JP
Japan
Prior art keywords
growth
substrate
soln
solution
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13492686A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0419196B2 (enrdf_load_stackoverflow
Inventor
Tsunehiro Unno
恒弘 海野
Mineo Wajima
峰生 和島
Hisafumi Tate
尚史 楯
Taiichiro Konno
泰一郎 今野
Hiroshi Sugimoto
洋 杉本
Shoji Kuma
隈　彰二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP13492686A priority Critical patent/JPS62292693A/ja
Publication of JPS62292693A publication Critical patent/JPS62292693A/ja
Publication of JPH0419196B2 publication Critical patent/JPH0419196B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP13492686A 1986-06-12 1986-06-12 液相エピタキシャル成長方法 Granted JPS62292693A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13492686A JPS62292693A (ja) 1986-06-12 1986-06-12 液相エピタキシャル成長方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13492686A JPS62292693A (ja) 1986-06-12 1986-06-12 液相エピタキシャル成長方法

Publications (2)

Publication Number Publication Date
JPS62292693A true JPS62292693A (ja) 1987-12-19
JPH0419196B2 JPH0419196B2 (enrdf_load_stackoverflow) 1992-03-30

Family

ID=15139772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13492686A Granted JPS62292693A (ja) 1986-06-12 1986-06-12 液相エピタキシャル成長方法

Country Status (1)

Country Link
JP (1) JPS62292693A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010180085A (ja) * 2009-02-04 2010-08-19 Ihi Corp 基板ホルダ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843425A (enrdf_load_stackoverflow) * 1971-10-05 1973-06-23
JPS57180760U (enrdf_load_stackoverflow) * 1981-05-13 1982-11-16

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843425A (enrdf_load_stackoverflow) * 1971-10-05 1973-06-23
JPS57180760U (enrdf_load_stackoverflow) * 1981-05-13 1982-11-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010180085A (ja) * 2009-02-04 2010-08-19 Ihi Corp 基板ホルダ

Also Published As

Publication number Publication date
JPH0419196B2 (enrdf_load_stackoverflow) 1992-03-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees