JPS62290616A - ウエハ搬送機構 - Google Patents

ウエハ搬送機構

Info

Publication number
JPS62290616A
JPS62290616A JP13151786A JP13151786A JPS62290616A JP S62290616 A JPS62290616 A JP S62290616A JP 13151786 A JP13151786 A JP 13151786A JP 13151786 A JP13151786 A JP 13151786A JP S62290616 A JPS62290616 A JP S62290616A
Authority
JP
Japan
Prior art keywords
wafer
arm
carrier
carriers
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13151786A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0577565B2 (enrdf_load_stackoverflow
Inventor
Taketoshi Itoyama
糸山　武敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP13151786A priority Critical patent/JPS62290616A/ja
Publication of JPS62290616A publication Critical patent/JPS62290616A/ja
Publication of JPH0577565B2 publication Critical patent/JPH0577565B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Specific Conveyance Elements (AREA)
JP13151786A 1986-06-05 1986-06-05 ウエハ搬送機構 Granted JPS62290616A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13151786A JPS62290616A (ja) 1986-06-05 1986-06-05 ウエハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13151786A JPS62290616A (ja) 1986-06-05 1986-06-05 ウエハ搬送機構

Publications (2)

Publication Number Publication Date
JPS62290616A true JPS62290616A (ja) 1987-12-17
JPH0577565B2 JPH0577565B2 (enrdf_load_stackoverflow) 1993-10-27

Family

ID=15059897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13151786A Granted JPS62290616A (ja) 1986-06-05 1986-06-05 ウエハ搬送機構

Country Status (1)

Country Link
JP (1) JPS62290616A (enrdf_load_stackoverflow)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166534A (ja) * 1987-12-23 1989-06-30 Hitachi Ltd 被処理物収納部支持機構
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JPH0348439A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置
JPH05198659A (ja) * 1992-01-22 1993-08-06 Tokyo Ohka Kogyo Co Ltd プラズマ処理装置
JPH06196541A (ja) * 1991-11-18 1994-07-15 Fusion Syst Corp ウエハ搬送装置
JPH06268044A (ja) * 1993-03-15 1994-09-22 Tdk Corp クリーン搬送方法及び装置
JPH07235580A (ja) * 1994-02-22 1995-09-05 Tdk Corp クリーン搬送方法及び装置
EP0452939B1 (en) * 1990-04-19 2000-11-02 Applied Materials, Inc. Apparatus and method for loading workpieces in a processing system
JP2007173285A (ja) * 2005-12-19 2007-07-05 Nec Electronics Corp ウェーハプローバ装置およびウェーハ検査方法
TWI452643B (zh) * 2006-05-11 2014-09-11 Tokyo Electron Ltd Inspection device and inspection method

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166534A (ja) * 1987-12-23 1989-06-30 Hitachi Ltd 被処理物収納部支持機構
JPH02263454A (ja) * 1989-03-20 1990-10-26 Tel Sagami Ltd 熱処理装置
JPH0348439A (ja) * 1989-07-17 1991-03-01 Tokyo Electron Sagami Ltd 熱処理装置
US6454508B2 (en) 1990-04-19 2002-09-24 Applied Materials, Inc. Dual cassette load lock
US6599076B2 (en) 1990-04-19 2003-07-29 Applied Materials, Inc. Dual cassette load lock
US6454519B1 (en) 1990-04-19 2002-09-24 Applied Materials, Inc. Dual cassette load lock
EP0452939B1 (en) * 1990-04-19 2000-11-02 Applied Materials, Inc. Apparatus and method for loading workpieces in a processing system
JPH06196541A (ja) * 1991-11-18 1994-07-15 Fusion Syst Corp ウエハ搬送装置
JPH05198659A (ja) * 1992-01-22 1993-08-06 Tokyo Ohka Kogyo Co Ltd プラズマ処理装置
JPH06268044A (ja) * 1993-03-15 1994-09-22 Tdk Corp クリーン搬送方法及び装置
JPH07235580A (ja) * 1994-02-22 1995-09-05 Tdk Corp クリーン搬送方法及び装置
JP2007173285A (ja) * 2005-12-19 2007-07-05 Nec Electronics Corp ウェーハプローバ装置およびウェーハ検査方法
TWI452643B (zh) * 2006-05-11 2014-09-11 Tokyo Electron Ltd Inspection device and inspection method

Also Published As

Publication number Publication date
JPH0577565B2 (enrdf_load_stackoverflow) 1993-10-27

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