JPS6228588B2 - - Google Patents
Info
- Publication number
- JPS6228588B2 JPS6228588B2 JP54091599A JP9159979A JPS6228588B2 JP S6228588 B2 JPS6228588 B2 JP S6228588B2 JP 54091599 A JP54091599 A JP 54091599A JP 9159979 A JP9159979 A JP 9159979A JP S6228588 B2 JPS6228588 B2 JP S6228588B2
- Authority
- JP
- Japan
- Prior art keywords
- base
- region
- conductive material
- film
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9159979A JPS5617034A (en) | 1979-07-20 | 1979-07-20 | Semiconductor device and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9159979A JPS5617034A (en) | 1979-07-20 | 1979-07-20 | Semiconductor device and manufacture thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5617034A JPS5617034A (en) | 1981-02-18 |
| JPS6228588B2 true JPS6228588B2 (enExample) | 1987-06-22 |
Family
ID=14031013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9159979A Granted JPS5617034A (en) | 1979-07-20 | 1979-07-20 | Semiconductor device and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5617034A (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547879A (en) * | 1977-06-20 | 1979-01-20 | Nec Corp | Manufacture for semiconductor device |
-
1979
- 1979-07-20 JP JP9159979A patent/JPS5617034A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5617034A (en) | 1981-02-18 |
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