JPS622764Y2 - - Google Patents

Info

Publication number
JPS622764Y2
JPS622764Y2 JP1980172831U JP17283180U JPS622764Y2 JP S622764 Y2 JPS622764 Y2 JP S622764Y2 JP 1980172831 U JP1980172831 U JP 1980172831U JP 17283180 U JP17283180 U JP 17283180U JP S622764 Y2 JPS622764 Y2 JP S622764Y2
Authority
JP
Japan
Prior art keywords
pattern
alignment
patterns
mask
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980172831U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5794941U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980172831U priority Critical patent/JPS622764Y2/ja
Publication of JPS5794941U publication Critical patent/JPS5794941U/ja
Application granted granted Critical
Publication of JPS622764Y2 publication Critical patent/JPS622764Y2/ja
Expired legal-status Critical Current

Links

JP1980172831U 1980-12-02 1980-12-02 Expired JPS622764Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980172831U JPS622764Y2 (pm) 1980-12-02 1980-12-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980172831U JPS622764Y2 (pm) 1980-12-02 1980-12-02

Publications (2)

Publication Number Publication Date
JPS5794941U JPS5794941U (pm) 1982-06-11
JPS622764Y2 true JPS622764Y2 (pm) 1987-01-22

Family

ID=29531115

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980172831U Expired JPS622764Y2 (pm) 1980-12-02 1980-12-02

Country Status (1)

Country Link
JP (1) JPS622764Y2 (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5673719B2 (ja) 2013-03-27 2015-02-18 Tdk株式会社 電子部品の製造装置およびその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5922370B2 (ja) * 1975-06-20 1984-05-26 松下電器産業株式会社 集積回路用マスクの位置合わせ方法
JPS5854496B2 (ja) * 1975-12-24 1983-12-05 セイコーエプソン株式会社 半導体装置の製造方法
JPS5394878A (en) * 1977-01-31 1978-08-19 Matsushita Electric Ind Co Ltd Mask matching key

Also Published As

Publication number Publication date
JPS5794941U (pm) 1982-06-11

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