JPS6227530B2 - - Google Patents

Info

Publication number
JPS6227530B2
JPS6227530B2 JP54066191A JP6619179A JPS6227530B2 JP S6227530 B2 JPS6227530 B2 JP S6227530B2 JP 54066191 A JP54066191 A JP 54066191A JP 6619179 A JP6619179 A JP 6619179A JP S6227530 B2 JPS6227530 B2 JP S6227530B2
Authority
JP
Japan
Prior art keywords
reaction tube
arm
wafer
heat treatment
support arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54066191A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55158626A (en
Inventor
Kazuhiro Nakao
Hiromitsu Mishimagi
Masao Pponda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP6619179A priority Critical patent/JPS55158626A/ja
Publication of JPS55158626A publication Critical patent/JPS55158626A/ja
Publication of JPS6227530B2 publication Critical patent/JPS6227530B2/ja
Granted legal-status Critical Current

Links

JP6619179A 1979-05-30 1979-05-30 Heat treating apparatus Granted JPS55158626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6619179A JPS55158626A (en) 1979-05-30 1979-05-30 Heat treating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6619179A JPS55158626A (en) 1979-05-30 1979-05-30 Heat treating apparatus

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP21508285A Division JPS61184821A (ja) 1985-09-30 1985-09-30 熱処理装置
JP21508385A Division JPS61184822A (ja) 1985-09-30 1985-09-30 熱処理方法

Publications (2)

Publication Number Publication Date
JPS55158626A JPS55158626A (en) 1980-12-10
JPS6227530B2 true JPS6227530B2 (enrdf_load_stackoverflow) 1987-06-15

Family

ID=13308699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6619179A Granted JPS55158626A (en) 1979-05-30 1979-05-30 Heat treating apparatus

Country Status (1)

Country Link
JP (1) JPS55158626A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5636129A (en) * 1979-08-31 1981-04-09 Hitachi Ltd Method and device for heat treatment of semiconductor thin plate
JPS58212146A (ja) * 1982-04-29 1983-12-09 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング マガジン内のシリコン・ウエフアを炉内へ導入するための装置
JPS58207626A (ja) * 1982-05-28 1983-12-03 Hitachi Ltd 半導体処理装置
JPS59158953A (ja) * 1983-03-02 1984-09-08 Ushio Inc 光照射加熱装置
JPS59158954A (ja) * 1983-03-02 1984-09-08 Ushio Inc 光照射加熱装置
JPS59200431A (ja) * 1983-04-28 1984-11-13 Toshiba Ceramics Co Ltd ウエハ−ボ−ト搬送用具
JPS6173324A (ja) * 1984-09-17 1986-04-15 Dainippon Screen Mfg Co Ltd 熱処理装置
JPH0797563B2 (ja) * 1985-08-12 1995-10-18 株式会社日立製作所 熱処理装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3744650A (en) * 1971-10-26 1973-07-10 Semiconductor Elect Memories Boat mover for semiconductor fusion process
JPS50139778A (enrdf_load_stackoverflow) * 1974-04-25 1975-11-08
JPS5729042B2 (enrdf_load_stackoverflow) * 1974-06-07 1982-06-21

Also Published As

Publication number Publication date
JPS55158626A (en) 1980-12-10

Similar Documents

Publication Publication Date Title
JPS6227530B2 (enrdf_load_stackoverflow)
US4468195A (en) Thermal treatment apparatus
JPH0263290B2 (enrdf_load_stackoverflow)
JPS634343B2 (enrdf_load_stackoverflow)
US4955808A (en) Method of heat-processing objects and device and boat for the same
JPS623571B2 (enrdf_load_stackoverflow)
JPS61184821A (ja) 熱処理装置
JPS61184822A (ja) 熱処理方法
JPS5917970B2 (ja) 熱処理装置
JP2590352B2 (ja) 縦型熱処理装置
JPH07115069A (ja) 加熱処理装置および熱処理方法
KR0148714B1 (ko) 매엽식 저압화학증기증착기의 서셉터 장치
JPH01315131A (ja) 熱処理装置
JPS6038017B2 (ja) 熱処理炉
JP3064609B2 (ja) 炉内被処理物取り出し装置
JPH09293683A (ja) 熱処理炉
JPS63248125A (ja) 熱処理装置
JPS63100734A (ja) 熱処理装置
JPS58111315A (ja) 蓋開閉装置
JP2666964B2 (ja) 電子ビーム描画装置の試料シャトル出入装置
JP2555380B2 (ja) 熱処理方法
JPH01305290A (ja) 縦型熱処理炉
JP3836291B2 (ja) 箱形熱処理炉
JPH01183813A (ja) 熱処理炉に対する被処理体の搬送装置及び熱処理方法
JPS58122723A (ja) 半導体ウエハの加熱処理装置