JPH0220826Y2 - - Google Patents
Info
- Publication number
- JPH0220826Y2 JPH0220826Y2 JP2024785U JP2024785U JPH0220826Y2 JP H0220826 Y2 JPH0220826 Y2 JP H0220826Y2 JP 2024785 U JP2024785 U JP 2024785U JP 2024785 U JP2024785 U JP 2024785U JP H0220826 Y2 JPH0220826 Y2 JP H0220826Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer boat
- lid
- processing tube
- opening
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 87
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 description 17
- 238000003825 pressing Methods 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 239000010453 quartz Substances 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- 229910052710 silicon Inorganic materials 0.000 description 10
- 239000010703 silicon Substances 0.000 description 10
- 238000007747 plating Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002657 fibrous material Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 239000012494 Quartz wool Substances 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000005338 frosted glass Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024785U JPH0220826Y2 (enrdf_load_stackoverflow) | 1985-02-15 | 1985-02-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024785U JPH0220826Y2 (enrdf_load_stackoverflow) | 1985-02-15 | 1985-02-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61138238U JPS61138238U (enrdf_load_stackoverflow) | 1986-08-27 |
| JPH0220826Y2 true JPH0220826Y2 (enrdf_load_stackoverflow) | 1990-06-06 |
Family
ID=30510557
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024785U Expired JPH0220826Y2 (enrdf_load_stackoverflow) | 1985-02-15 | 1985-02-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220826Y2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH071790Y2 (ja) * | 1987-06-17 | 1995-01-18 | 国際電気株式会社 | 拡散装置用自動キャップ |
| JP2617947B2 (ja) * | 1987-10-05 | 1997-06-11 | 東京エレクトロン株式会社 | 加熱装置 |
| JP2537254B2 (ja) * | 1987-12-29 | 1996-09-25 | 東京エレクトロン株式会社 | 縦型熱処理炉 |
| JP3798721B2 (ja) * | 2002-03-29 | 2006-07-19 | 東芝セラミックス株式会社 | 半導体熱処理用反射板およびこの半導体熱処理用反射板の製造方法 |
| JP4219702B2 (ja) * | 2003-02-06 | 2009-02-04 | 東京エレクトロン株式会社 | 減圧処理装置 |
-
1985
- 1985-02-15 JP JP2024785U patent/JPH0220826Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61138238U (enrdf_load_stackoverflow) | 1986-08-27 |
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