JPS6226183B2 - - Google Patents
Info
- Publication number
- JPS6226183B2 JPS6226183B2 JP20154582A JP20154582A JPS6226183B2 JP S6226183 B2 JPS6226183 B2 JP S6226183B2 JP 20154582 A JP20154582 A JP 20154582A JP 20154582 A JP20154582 A JP 20154582A JP S6226183 B2 JPS6226183 B2 JP S6226183B2
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- groove
- shaped
- side surfaces
- scratch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000013078 crystal Substances 0.000 claims description 34
- 239000004065 semiconductor Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 13
- 239000002390 adhesive tape Substances 0.000 claims description 10
- 238000007796 conventional method Methods 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000003776 cleavage reaction Methods 0.000 description 4
- 230000001788 irregular Effects 0.000 description 4
- 230000007017 scission Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005453 pelletization Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57201545A JPS5990940A (ja) | 1982-11-17 | 1982-11-17 | 半導体素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57201545A JPS5990940A (ja) | 1982-11-17 | 1982-11-17 | 半導体素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5990940A JPS5990940A (ja) | 1984-05-25 |
| JPS6226183B2 true JPS6226183B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-06-08 |
Family
ID=16442821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57201545A Granted JPS5990940A (ja) | 1982-11-17 | 1982-11-17 | 半導体素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5990940A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6116591A (ja) * | 1984-07-02 | 1986-01-24 | Rohm Co Ltd | 半導体レ−ザのチツプ製造方法 |
| GB2269268B (en) * | 1992-07-31 | 1995-11-29 | Northern Telecom Ltd | Semiconductor slice cleaving |
| DE10101737A1 (de) * | 2001-01-16 | 2002-07-25 | Osram Opto Semiconductors Gmbh | Verfahren zum Vereinzeln von Wafern in Chips |
-
1982
- 1982-11-17 JP JP57201545A patent/JPS5990940A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5990940A (ja) | 1984-05-25 |