JPS6226179B2 - - Google Patents
Info
- Publication number
- JPS6226179B2 JPS6226179B2 JP57092885A JP9288582A JPS6226179B2 JP S6226179 B2 JPS6226179 B2 JP S6226179B2 JP 57092885 A JP57092885 A JP 57092885A JP 9288582 A JP9288582 A JP 9288582A JP S6226179 B2 JPS6226179 B2 JP S6226179B2
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- sample
- sample chamber
- signal cable
- tester
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 69
- 238000010894 electron beam technology Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 8
- 238000003745 diagnosis Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000002542 deteriorative effect Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57092885A JPS58209138A (ja) | 1982-05-31 | 1982-05-31 | 電子ビ−ムを用いたｉｃテスタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57092885A JPS58209138A (ja) | 1982-05-31 | 1982-05-31 | 電子ビ−ムを用いたｉｃテスタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58209138A JPS58209138A (ja) | 1983-12-06 |
| JPS6226179B2 true JPS6226179B2 (enrdf_load_stackoverflow) | 1987-06-08 |
Family
ID=14066905
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57092885A Granted JPS58209138A (ja) | 1982-05-31 | 1982-05-31 | 電子ビ−ムを用いたｉｃテスタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58209138A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4706019A (en) * | 1985-11-15 | 1987-11-10 | Fairchild Camera And Instrument Corporation | Electron beam test probe system for analyzing integrated circuits |
-
1982
- 1982-05-31 JP JP57092885A patent/JPS58209138A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58209138A (ja) | 1983-12-06 |
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