JPS6225617B2 - - Google Patents

Info

Publication number
JPS6225617B2
JPS6225617B2 JP4751683A JP4751683A JPS6225617B2 JP S6225617 B2 JPS6225617 B2 JP S6225617B2 JP 4751683 A JP4751683 A JP 4751683A JP 4751683 A JP4751683 A JP 4751683A JP S6225617 B2 JPS6225617 B2 JP S6225617B2
Authority
JP
Japan
Prior art keywords
gas
oxygen
reaction
flame
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4751683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59174535A (ja
Inventor
Haruo Okamoto
Mikio Endo
Hiroyuki Koide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP4751683A priority Critical patent/JPS59174535A/ja
Publication of JPS59174535A publication Critical patent/JPS59174535A/ja
Publication of JPS6225617B2 publication Critical patent/JPS6225617B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C03B37/0142—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01413—Reactant delivery systems
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/06—Doped silica-based glasses
    • C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
    • C03B2201/40—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn
    • C03B2201/42—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with transition metals other than rare earth metals, e.g. Zr, Nb, Ta or Zn doped with titanium
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/60—Relationship between burner and deposit, e.g. position
    • C03B2207/62—Distance

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)
JP4751683A 1983-03-22 1983-03-22 光伝送用石英母材の製造方法 Granted JPS59174535A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4751683A JPS59174535A (ja) 1983-03-22 1983-03-22 光伝送用石英母材の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4751683A JPS59174535A (ja) 1983-03-22 1983-03-22 光伝送用石英母材の製造方法

Publications (2)

Publication Number Publication Date
JPS59174535A JPS59174535A (ja) 1984-10-03
JPS6225617B2 true JPS6225617B2 (enExample) 1987-06-04

Family

ID=12777269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4751683A Granted JPS59174535A (ja) 1983-03-22 1983-03-22 光伝送用石英母材の製造方法

Country Status (1)

Country Link
JP (1) JPS59174535A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010064915A (ja) 2008-09-09 2010-03-25 Shin-Etsu Chemical Co Ltd 光ファイバ母材の製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7067439B2 (en) * 2002-06-14 2006-06-27 Applied Materials, Inc. ALD metal oxide deposition process using direct oxidation
JP5737070B2 (ja) * 2010-09-02 2015-06-17 信越化学工業株式会社 チタニアドープ石英ガラス及びその製造方法
JPWO2012105513A1 (ja) * 2011-01-31 2014-07-03 旭硝子株式会社 チタニアを含有するシリカガラス体の製造方法およびチタニアを含有するシリカガラス体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010064915A (ja) 2008-09-09 2010-03-25 Shin-Etsu Chemical Co Ltd 光ファイバ母材の製造方法

Also Published As

Publication number Publication date
JPS59174535A (ja) 1984-10-03

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