JPS62226639A - 半導体装置の合せずれ検出方法 - Google Patents

半導体装置の合せずれ検出方法

Info

Publication number
JPS62226639A
JPS62226639A JP6992286A JP6992286A JPS62226639A JP S62226639 A JPS62226639 A JP S62226639A JP 6992286 A JP6992286 A JP 6992286A JP 6992286 A JP6992286 A JP 6992286A JP S62226639 A JPS62226639 A JP S62226639A
Authority
JP
Japan
Prior art keywords
misalignment
conductive layer
contact hole
insulating film
branch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6992286A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0435907B2 (en:Method
Inventor
Michihiro Ishikawa
通弘 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP6992286A priority Critical patent/JPS62226639A/ja
Publication of JPS62226639A publication Critical patent/JPS62226639A/ja
Publication of JPH0435907B2 publication Critical patent/JPH0435907B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Electron Beam Exposure (AREA)
JP6992286A 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法 Granted JPS62226639A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6992286A JPS62226639A (ja) 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6992286A JPS62226639A (ja) 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法

Publications (2)

Publication Number Publication Date
JPS62226639A true JPS62226639A (ja) 1987-10-05
JPH0435907B2 JPH0435907B2 (en:Method) 1992-06-12

Family

ID=13416665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6992286A Granted JPS62226639A (ja) 1986-03-28 1986-03-28 半導体装置の合せずれ検出方法

Country Status (1)

Country Link
JP (1) JPS62226639A (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100490277B1 (ko) * 1996-07-26 2005-08-05 소니 가부시끼 가이샤 얼라인먼트에러측정방법및얼라인먼트에러측정패턴
JP2013211445A (ja) * 2012-03-30 2013-10-10 Fujitsu Semiconductor Ltd 半導体装置用試験素子

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100490277B1 (ko) * 1996-07-26 2005-08-05 소니 가부시끼 가이샤 얼라인먼트에러측정방법및얼라인먼트에러측정패턴
JP2013211445A (ja) * 2012-03-30 2013-10-10 Fujitsu Semiconductor Ltd 半導体装置用試験素子

Also Published As

Publication number Publication date
JPH0435907B2 (en:Method) 1992-06-12

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Legal Events

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LAPS Cancellation because of no payment of annual fees