JPS622250U - - Google Patents

Info

Publication number
JPS622250U
JPS622250U JP9232085U JP9232085U JPS622250U JP S622250 U JPS622250 U JP S622250U JP 9232085 U JP9232085 U JP 9232085U JP 9232085 U JP9232085 U JP 9232085U JP S622250 U JPS622250 U JP S622250U
Authority
JP
Japan
Prior art keywords
probe card
chassis
stage
semiconductor wafer
wafer inspection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9232085U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9232085U priority Critical patent/JPS622250U/ja
Publication of JPS622250U publication Critical patent/JPS622250U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案のウエハ検査装置の要部の模式
図、第２図は従来のウエハ検査装置の模式図であ
る。 １……シヤーシ、２……プローブカード、２ａ
……触針、２１……マーク、３……ステージ、３
１……レーザ光源、３２……受光部、４……レー
ザ光源。 FIG. 1 is a schematic diagram of the main parts of a wafer inspection apparatus according to the present invention, and FIG. 2 is a schematic diagram of a conventional wafer inspection apparatus. 1... Chassis, 2... Probe card, 2a
...Stylus, 21...Mark, 3...Stage, 3
1... Laser light source, 32... Light receiving section, 4... Laser light source.

Claims (1)

【実用新案登録請求の範囲】 シヤーシと、該シヤーシに位置決めされたプロ
ーブカードと、該シヤーシ及び該プローブカード
の間に移動可能に設けられたステージとを具備し
、該ステージに半導体ウエハを固定して上記プロ
ーブカードに対して位置決めし、上記プローブカ
ードの触針により該半導体ウエハを検査するウエ
ハ検査装置において、 上記プローブカードと上記ステージの両者にそ
の相互間の相対位置検知用の手段を設けたことを
特徴とするウエハ検査装置。[Claims for Utility Model Registration] A chassis, a probe card positioned on the chassis, and a stage movably provided between the chassis and the probe card, and a semiconductor wafer is fixed to the stage. In the wafer inspection apparatus for positioning the semiconductor wafer with respect to the probe card by using the stylus of the probe card, the probe card and the stage are both provided with means for detecting relative positions therebetween. A wafer inspection device characterized by:
JP9232085U 1985-06-20 1985-06-20 Pending JPS622250U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9232085U JPS622250U (en) 1985-06-20 1985-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9232085U JPS622250U (en) 1985-06-20 1985-06-20

Publications (1)

Publication Number Publication Date
JPS622250U true JPS622250U (en) 1987-01-08

Family

ID=30649013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9232085U Pending JPS622250U (en) 1985-06-20 1985-06-20

Country Status (1)

Country Link
JP (1) JPS622250U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161174A (en) * 1987-12-17 1989-06-23 Tokyo Electron Ltd Probe device
JPH07110364A (en) * 1994-03-28 1995-04-25 Tokyo Electron Ltd Apparatus and method for probing

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541630A (en) * 1977-06-06 1979-01-08 Canon Inc Image bearing material
JPS58111335A (en) * 1981-12-25 1983-07-02 Hitachi Ltd Wafer prober for optical element
JPS5917260A (en) * 1982-07-20 1984-01-28 Mitsubishi Electric Corp Testing method for semiconductor wafer
JPS6018929A (en) * 1983-07-12 1985-01-31 Nec Corp Inspection device for position of probe
JPS60213040A (en) * 1984-04-09 1985-10-25 Hitachi Ltd Wafer prober
JPS6119143A (en) * 1984-07-06 1986-01-28 Nec Corp Inspecting apparatus for semiconductor device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541630A (en) * 1977-06-06 1979-01-08 Canon Inc Image bearing material
JPS58111335A (en) * 1981-12-25 1983-07-02 Hitachi Ltd Wafer prober for optical element
JPS5917260A (en) * 1982-07-20 1984-01-28 Mitsubishi Electric Corp Testing method for semiconductor wafer
JPS6018929A (en) * 1983-07-12 1985-01-31 Nec Corp Inspection device for position of probe
JPS60213040A (en) * 1984-04-09 1985-10-25 Hitachi Ltd Wafer prober
JPS6119143A (en) * 1984-07-06 1986-01-28 Nec Corp Inspecting apparatus for semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01161174A (en) * 1987-12-17 1989-06-23 Tokyo Electron Ltd Probe device
JPH07110364A (en) * 1994-03-28 1995-04-25 Tokyo Electron Ltd Apparatus and method for probing

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