JPS6397111U - - Google Patents
Info
- Publication number
- JPS6397111U JPS6397111U JP19060586U JP19060586U JPS6397111U JP S6397111 U JPS6397111 U JP S6397111U JP 19060586 U JP19060586 U JP 19060586U JP 19060586 U JP19060586 U JP 19060586U JP S6397111 U JPS6397111 U JP S6397111U
- Authority
- JP
- Japan
- Prior art keywords
- shaped body
- chuck
- disc
- storage device
- chucks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Description
第１図は従来技術による位置補正手段を説明す
るための平面図、第２図は本案の実施例を示すブ
ロツク線図、第３図は本案の実施例に係る動作シ
ーケンスを説明するためのフローチヤートである
。
１……情報処理装置、２……記憶装置、３……
測長系、４……インタフエース、５……光センサ
投光部、６……光センサ受光部、７……真空チヤ
ツク、８……円板形状体、９……ＸＹステージ、
１０……センタリング治具、１１……基準点。
Fig. 1 is a plan view for explaining the position correction means according to the prior art, Fig. 2 is a block diagram showing an embodiment of the present invention, and Fig. 3 is a flowchart for explaining the operation sequence according to the embodiment of the present invention. It's a chat. 1... Information processing device, 2... Storage device, 3...
Length measurement system, 4... Interface, 5... Optical sensor light emitting section, 6... Optical sensor light receiving section, 7... Vacuum chuck, 8... Disk shaped body, 9... XY stage,
10... Centering jig, 11... Reference point.
Claims (1)
ーブル上に搭載された円板形状体を保持するチヤ
ツクと、該チヤツクに保持された該円板形状体の
端部を検出可能な複数個のセンサと、ＸＹテーブ
ルの移動量を記憶する記憶装置と、記憶装置内部
のデータを演算処理する装置とを具備したことを
特徴とする円板形状体位置補正装置。 A chuck that holds a disc-shaped body mounted on an XY table equipped with a length measuring means that can measure its position, and a plurality of chucks that can detect the end of the disc-shaped body held by the chuck. A disk-shaped body position correction device comprising: a sensor; a storage device that stores the amount of movement of an XY table; and a device that performs arithmetic processing on data inside the storage device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19060586U JPS6397111U (en) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19060586U JPS6397111U (en) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6397111U true JPS6397111U (en) | 1988-06-23 |
Family
ID=31143980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19060586U Pending JPS6397111U (en) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6397111U (en) |
-
1986
- 1986-12-12 JP JP19060586U patent/JPS6397111U/ja active Pending
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