JPH0168566U - - Google Patents
Info
- Publication number
- JPH0168566U JPH0168566U JP1987163343U JP16334387U JPH0168566U JP H0168566 U JPH0168566 U JP H0168566U JP 1987163343 U JP1987163343 U JP 1987163343U JP 16334387 U JP16334387 U JP 16334387U JP H0168566 U JPH0168566 U JP H0168566U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- contact
- support member
- counts
- wafer carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 9
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の実施例を示す模式図、第２図
はその当接ロツドの拡大図である。
１；ウエハーキヤリア、２；ウエハー、３；当
接ロツド、４；固定治具、５；計数器、６；マイ
クロスイツチ、７；ガイド。
FIG. 1 is a schematic diagram showing an embodiment of the present invention, and FIG. 2 is an enlarged view of its abutting rod. 1: Wafer carrier, 2: Wafer, 3: Contact rod, 4: Fixing jig, 5: Counter, 6: Micro switch, 7: Guide.
Claims (1)
数を計数するウエハー計数装置において、支持部
材と、この支持部材に一方向に配列されウエハー
キヤリア内のウエハーに当接可能の複数個の当接
部材と、各当接部材の当接端に取り付けられウエ
ハーの押圧によりオン信号を出力するセンサーと
、このオン信号を出力しているセンサーの数を計
数する計数器とを有し、支持部材をウエハーキヤ
リアに近づけて当接部材をウエハーに当接させる
ことを特徴とするウエハー計数装置。 A wafer counting device that counts the number of wafers stored in a wafer carrier includes a support member, a plurality of contact members arranged in one direction on the support member and capable of contacting wafers in the wafer carrier; It has a sensor that is attached to the contact end of the contact member and outputs an ON signal when the wafer is pressed, and a counter that counts the number of sensors outputting this ON signal, and the support member is brought close to the wafer carrier. A wafer counting device characterized by bringing a contact member into contact with a wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163343U JPH0168566U (en) | 1987-10-26 | 1987-10-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987163343U JPH0168566U (en) | 1987-10-26 | 1987-10-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0168566U true JPH0168566U (en) | 1989-05-02 |
Family
ID=31447984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987163343U Pending JPH0168566U (en) | 1987-10-26 | 1987-10-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0168566U (en) |
-
1987
- 1987-10-26 JP JP1987163343U patent/JPH0168566U/ja active Pending