JPS61162051U - - Google Patents
Info
- Publication number
- JPS61162051U JPS61162051U JP4321085U JP4321085U JPS61162051U JP S61162051 U JPS61162051 U JP S61162051U JP 4321085 U JP4321085 U JP 4321085U JP 4321085 U JP4321085 U JP 4321085U JP S61162051 U JPS61162051 U JP S61162051U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- wafer
- section
- sample detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
Description
第１図は、本考案の一実施例であるカセツト内
試料検出装置を示す平面図、第２図は第１図の正
面図である。
１……ウエハカセツト、２……ウエハ、３……
センサ、４……アーム、５……アーム駆動モータ
、６……軸、７……軸駆動モータ。
FIG. 1 is a plan view showing an in-cassette sample detection device which is an embodiment of the present invention, and FIG. 2 is a front view of FIG. 1. 1...Wafer cassette, 2...Wafer, 3...
Sensor, 4...Arm, 5...Arm drive motor, 6...Axis, 7...Axis drive motor.
Claims (1)
ウエハ検出センサを設けたアームと、該アームを
２方向に移動させる駆動装置とを有することを特
徴とするカセツト内試料検出装置。 ２ 上記アームは、ウエハ枚数検出時のみウエハ
カセツト部に移動し、その他の時は退避出来るよ
うにした実用新案登録請求の範囲第１項記載のカ
セツト内試料検出装置。[Claims for Utility Model Registration] 1. A sample detection device in a cassette, characterized in that the wafer cassette device section has an arm provided with at least one wafer detection sensor, and a drive device for moving the arm in two directions. . 2. The in-cassette sample detection device according to claim 1, wherein the arm moves to the wafer cassette section only when detecting the number of wafers, and is retracted at other times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4321085U JPS61162051U (en) | 1985-03-27 | 1985-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4321085U JPS61162051U (en) | 1985-03-27 | 1985-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61162051U true JPS61162051U (en) | 1986-10-07 |
Family
ID=30554669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4321085U Pending JPS61162051U (en) | 1985-03-27 | 1985-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61162051U (en) |
-
1985
- 1985-03-27 JP JP4321085U patent/JPS61162051U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS61153345U (en) | ||
| JPS61162051U (en) | ||
| JPS61176187U (en) | ||
| JPS6265874U (en) | ||
| JPS6191107U (en) | ||
| JPH0227888U (en) | ||
| JPH0289304U (en) | ||
| JPS6176375U (en) | ||
| JPS6211824U (en) | ||
| JPS60113861U (en) | Grinding wheel forming equipment | |
| JPS6328812U (en) | ||
| JPS63136841U (en) | ||
| JPS6299630U (en) | ||
| JPH03106727U (en) | ||
| JPS62141711U (en) | ||
| JPS6367911U (en) | ||
| JPH0373071U (en) | ||
| JPH01175149U (en) | ||
| JPS6439383U (en) | ||
| JPS58101110U (en) | Cross-sectional shape measuring device | |
| JPS6190263U (en) | ||
| JPS62140455U (en) | ||
| JPH01144876U (en) | ||
| JPS6240568U (en) | ||
| JPS63175623U (en) |