JPH0371621U - - Google Patents
Info
- Publication number
- JPH0371621U JPH0371621U JP13209989U JP13209989U JPH0371621U JP H0371621 U JPH0371621 U JP H0371621U JP 13209989 U JP13209989 U JP 13209989U JP 13209989 U JP13209989 U JP 13209989U JP H0371621 U JPH0371621 U JP H0371621U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- section
- pellicle
- measuring
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 description 1
Description
第１図は本案の一実施例の正面図である。
１……レテイクル支持部、２……ハンドリング
部、３……ペリクル貼付け精度測長部。
FIG. 1 is a front view of an embodiment of the present invention. 1... Reticle support section, 2... Handling section, 3... Pellicle attachment accuracy measurement section.
Claims (1)
クル端面とペリクルとの距離を測るペリクル貼付
精度測長部と治具をつかむハンドリング部より成
る事を特徴としたレテイクル搬送装置。 A reticle conveying device characterized by comprising a reticle support section on which a reticle is placed, a pellicle pasting accuracy measuring section for measuring the distance between the end face of the reticle and the pellicle, and a handling section for gripping a jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13209989U JPH0371621U (en) | 1989-11-15 | 1989-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13209989U JPH0371621U (en) | 1989-11-15 | 1989-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371621U true JPH0371621U (en) | 1991-07-19 |
Family
ID=31679572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13209989U Pending JPH0371621U (en) | 1989-11-15 | 1989-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371621U (en) |
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1989
- 1989-11-15 JP JP13209989U patent/JPH0371621U/ja active Pending