JPS648735U - - Google Patents
Info
- Publication number
- JPS648735U JPS648735U JP10148287U JP10148287U JPS648735U JP S648735 U JPS648735 U JP S648735U JP 10148287 U JP10148287 U JP 10148287U JP 10148287 U JP10148287 U JP 10148287U JP S648735 U JPS648735 U JP S648735U
- Authority
- JP
- Japan
- Prior art keywords
- marking
- wafer
- ink
- marker
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 2
- 239000003550 marker Substances 0.000 claims description 2
- 230000002950 deficient Effects 0.000 claims 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案ウエハ検査装置の概略的構成を
示す側面図である。
１……ウエハ、２……ウエハ支持台、３……マ
ーカ、４……インクマーキング、９……検出器、
１０……反射型フオトカプラ。
FIG. 1 is a side view showing the schematic configuration of the wafer inspection apparatus of the present invention. 1... Wafer, 2... Wafer support stand, 3... Marker, 4... Ink marking, 9... Detector,
10...Reflection type photocoupler.
Claims (1)
不良品チツプにインクマーキングを行なうウエハ
検査装置であつて、上記インクマーキングを行な
うマーカに当該マーキングを光学的に検出する検
出器を関連付けたことを特徴としたウエハ検査装
置。 Inspect each chip of the wafer on the wafer support,
1. A wafer inspection device for marking defective chips with ink, characterized in that the marker for making the ink marking is associated with a detector for optically detecting the marking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10148287U JPS648735U (en) | 1987-07-01 | 1987-07-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10148287U JPS648735U (en) | 1987-07-01 | 1987-07-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648735U true JPS648735U (en) | 1989-01-18 |
Family
ID=31330519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10148287U Pending JPS648735U (en) | 1987-07-01 | 1987-07-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648735U (en) |
-
1987
- 1987-07-01 JP JP10148287U patent/JPS648735U/ja active Pending