JPS62189650U - - Google Patents
Info
- Publication number
- JPS62189650U JPS62189650U JP5756486U JP5756486U JPS62189650U JP S62189650 U JPS62189650 U JP S62189650U JP 5756486 U JP5756486 U JP 5756486U JP 5756486 U JP5756486 U JP 5756486U JP S62189650 U JPS62189650 U JP S62189650U
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- measured
- defect
- optical inspection
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Sampling And Sample Adjustment (AREA)
Description
第１図は本考案の一実施例の概略構成図、第２
図は本考案の他の実施例の概略構成図、第３図は
本考案のさらに他の実施例の概略構成図、第４図
は本考案のさらに他の実施例の概略構成図、第５
図は層状フイルムにおける検査用基準シートの使
用状態図、第６図はこの種の光学的検査装置の概
略構成図である。
１：層状フイルム、６，８，１０，１２：検査
用基準シート、７ないし７Ｄ，９ないし９Ｅ，１
１ないし１１Ｄ，１３ないし１３Ｅ：基準欠点。
Figure 1 is a schematic diagram of an embodiment of the present invention;
3 is a schematic diagram of still another embodiment of the present invention; FIG. 4 is a schematic diagram of still another embodiment of the present invention; FIG.
The figure shows how a reference sheet for inspection is used in a layered film, and FIG. 6 is a schematic diagram of the structure of this type of optical inspection apparatus. 1: Layered film, 6, 8, 10, 12: Inspection reference sheet, 7 to 7D, 9 to 9E, 1
1 to 11D, 13 to 13E: Standard defects.
Claims (1)
的検査装置において、シート状に形成され前記シ
ート状の表面に前記欠点の検査基準となる基準欠
点が設けられ前記被測定物の表面に貼付して前記
被測定物を光学的に検査することを特徴とする光
学検査用基準シート。 An optical inspection device for inspecting defects occurring on the surface of an object to be measured, wherein the sheet is formed into a sheet, a reference defect is provided on the surface of the sheet to serve as an inspection reference for the defect, and the device is attached to the surface of the object to be measured. 1. A reference sheet for optical inspection, characterized in that the object to be measured is optically inspected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5756486U JPS62189650U (en) | 1986-04-18 | 1986-04-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5756486U JPS62189650U (en) | 1986-04-18 | 1986-04-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62189650U true JPS62189650U (en) | 1987-12-02 |
Family
ID=30887385
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5756486U Pending JPS62189650U (en) | 1986-04-18 | 1986-04-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62189650U (en) |
-
1986
- 1986-04-18 JP JP5756486U patent/JPS62189650U/ja active Pending
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