JPS62216223A - 半導体処理装置 - Google Patents
半導体処理装置Info
- Publication number
- JPS62216223A JPS62216223A JP4175287A JP4175287A JPS62216223A JP S62216223 A JPS62216223 A JP S62216223A JP 4175287 A JP4175287 A JP 4175287A JP 4175287 A JP4175287 A JP 4175287A JP S62216223 A JPS62216223 A JP S62216223A
- Authority
- JP
- Japan
- Prior art keywords
- space
- substrate
- reaction
- chamber
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 9
- 238000006243 chemical reaction Methods 0.000 claims abstract description 53
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 230000003213 activating effect Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 abstract description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 9
- 238000012423 maintenance Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 23
- 239000007795 chemical reaction product Substances 0.000 description 11
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 241000533950 Leucojum Species 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4175287A JPS62216223A (ja) | 1987-02-24 | 1987-02-24 | 半導体処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4175287A JPS62216223A (ja) | 1987-02-24 | 1987-02-24 | 半導体処理装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57167281A Division JPS5956726A (ja) | 1982-09-20 | 1982-09-25 | プラズマｃｖｄ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62216223A true JPS62216223A (ja) | 1987-09-22 |
| JPH0447455B2 JPH0447455B2 (enrdf_load_stackoverflow) | 1992-08-04 |
Family
ID=12617151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4175287A Granted JPS62216223A (ja) | 1987-02-24 | 1987-02-24 | 半導体処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62216223A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143718U (enrdf_load_stackoverflow) * | 1974-09-27 | 1976-03-31 | ||
| JPS5344487A (en) * | 1976-08-25 | 1978-04-21 | Wacker Chemitronic | Process for preparing large surfaced silicon plate not supported on substrate |
-
1987
- 1987-02-24 JP JP4175287A patent/JPS62216223A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5143718U (enrdf_load_stackoverflow) * | 1974-09-27 | 1976-03-31 | ||
| JPS5344487A (en) * | 1976-08-25 | 1978-04-21 | Wacker Chemitronic | Process for preparing large surfaced silicon plate not supported on substrate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0447455B2 (enrdf_load_stackoverflow) | 1992-08-04 |
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