JPS622152U - - Google Patents

Info

Publication number
JPS622152U
JPS622152U JP9355285U JP9355285U JPS622152U JP S622152 U JPS622152 U JP S622152U JP 9355285 U JP9355285 U JP 9355285U JP 9355285 U JP9355285 U JP 9355285U JP S622152 U JPS622152 U JP S622152U
Authority
JP
Japan
Prior art keywords
magnetic flux
magnetic pole
leakage magnetic
pole piece
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9355285U
Other languages
English (en)
Other versions
JPH0348838Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9355285U priority Critical patent/JPH0348838Y2/ja
Publication of JPS622152U publication Critical patent/JPS622152U/ja
Application granted granted Critical
Publication of JPH0348838Y2 publication Critical patent/JPH0348838Y2/ja
Expired legal-status Critical Current

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Description

【図面の簡単な説明】
第1図は本考案の一実施例の構成図、第2図は
第1図の実施例装置の磁界の状態を説明するため
の図、第3図は本考案の他の実施例を説明するた
めの図、第4図は従来装置の機械的構成図、第5
図は磁石による磁界の状態を示す図である。 1:電子銃、2:イオン吸着用セル、3:バン
ド、4:セル箱、5:碍子、6:ドーナツ電極、
7:電子銃部接続用フランジ、8:電極、9:ヨ
ーク、10,11:リング状磁石、12:磁極片
、13:励磁コイル。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) イオン吸着用セルを電子銃の周囲に多数配
    置し、これらイオン吸着用セルを上下からドーナ
    ツ状磁石で挾み込むように構成した装置において
    、前記磁石の漏洩磁束を光軸に対して対称に形成
    させ、且つ該漏洩磁束の磁路に該漏洩磁束を集中
    させて電子レンズを形成させるための磁極片を配
    置したことを特徴とするイオンポンプ。 (2) 前記磁極片により形成される電子レンズの
    レンズ作用の強弱を調整するため該磁極片に励磁
    コイルを捲回した実用新案登録請求の範囲第1項
    記載のイオンポンプ。
JP9355285U 1985-06-20 1985-06-20 Expired JPH0348838Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9355285U JPH0348838Y2 (ja) 1985-06-20 1985-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9355285U JPH0348838Y2 (ja) 1985-06-20 1985-06-20

Publications (2)

Publication Number Publication Date
JPS622152U true JPS622152U (ja) 1987-01-08
JPH0348838Y2 JPH0348838Y2 (ja) 1991-10-18

Family

ID=30651336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9355285U Expired JPH0348838Y2 (ja) 1985-06-20 1985-06-20

Country Status (1)

Country Link
JP (1) JPH0348838Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498746A (ja) * 1990-08-13 1992-03-31 Hitachi Ltd 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0498746A (ja) * 1990-08-13 1992-03-31 Hitachi Ltd 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0348838Y2 (ja) 1991-10-18

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