JPS62213287A - ジヨセフソン素子の製造方法 - Google Patents

ジヨセフソン素子の製造方法

Info

Publication number
JPS62213287A
JPS62213287A JP61054950A JP5495086A JPS62213287A JP S62213287 A JPS62213287 A JP S62213287A JP 61054950 A JP61054950 A JP 61054950A JP 5495086 A JP5495086 A JP 5495086A JP S62213287 A JPS62213287 A JP S62213287A
Authority
JP
Japan
Prior art keywords
superconductor electrode
layer
mask
superconductor
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61054950A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334237B2 (enrdf_load_stackoverflow
Inventor
Hisanao Tsuge
久尚 柘植
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61054950A priority Critical patent/JPS62213287A/ja
Publication of JPS62213287A publication Critical patent/JPS62213287A/ja
Publication of JPH0334237B2 publication Critical patent/JPH0334237B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP61054950A 1986-03-14 1986-03-14 ジヨセフソン素子の製造方法 Granted JPS62213287A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61054950A JPS62213287A (ja) 1986-03-14 1986-03-14 ジヨセフソン素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61054950A JPS62213287A (ja) 1986-03-14 1986-03-14 ジヨセフソン素子の製造方法

Publications (2)

Publication Number Publication Date
JPS62213287A true JPS62213287A (ja) 1987-09-19
JPH0334237B2 JPH0334237B2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=12984941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61054950A Granted JPS62213287A (ja) 1986-03-14 1986-03-14 ジヨセフソン素子の製造方法

Country Status (1)

Country Link
JP (1) JPS62213287A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023199419A1 (ja) 2022-04-13 2023-10-19 富士通株式会社 ジョセフソン接合素子、量子デバイス及びジョセフソン接合素子の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208873A (ja) * 1984-04-03 1985-10-21 Nec Corp ジヨセフソン接合素子の製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60208873A (ja) * 1984-04-03 1985-10-21 Nec Corp ジヨセフソン接合素子の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023199419A1 (ja) 2022-04-13 2023-10-19 富士通株式会社 ジョセフソン接合素子、量子デバイス及びジョセフソン接合素子の製造方法

Also Published As

Publication number Publication date
JPH0334237B2 (enrdf_load_stackoverflow) 1991-05-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term