JPS62207766A - 窒化珪素焼結体の製造方法 - Google Patents

窒化珪素焼結体の製造方法

Info

Publication number
JPS62207766A
JPS62207766A JP61050690A JP5069086A JPS62207766A JP S62207766 A JPS62207766 A JP S62207766A JP 61050690 A JP61050690 A JP 61050690A JP 5069086 A JP5069086 A JP 5069086A JP S62207766 A JPS62207766 A JP S62207766A
Authority
JP
Japan
Prior art keywords
silicon nitride
sintered body
powder
nitride sintered
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61050690A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545550B2 (enExample
Inventor
多島　容
芳朗 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP61050690A priority Critical patent/JPS62207766A/ja
Publication of JPS62207766A publication Critical patent/JPS62207766A/ja
Publication of JPH0545550B2 publication Critical patent/JPH0545550B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP61050690A 1986-03-10 1986-03-10 窒化珪素焼結体の製造方法 Granted JPS62207766A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61050690A JPS62207766A (ja) 1986-03-10 1986-03-10 窒化珪素焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61050690A JPS62207766A (ja) 1986-03-10 1986-03-10 窒化珪素焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS62207766A true JPS62207766A (ja) 1987-09-12
JPH0545550B2 JPH0545550B2 (enExample) 1993-07-09

Family

ID=12865920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61050690A Granted JPS62207766A (ja) 1986-03-10 1986-03-10 窒化珪素焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS62207766A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12426506B2 (en) 2019-07-19 2025-09-23 Evatec Ag Piezoelectric coating and deposition process

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188500A (en) * 1981-05-14 1982-11-19 Toshiba Corp Manufacturing apparatus for crystal of 3-5 group compound semiconductor
JPS5930766A (ja) * 1982-08-11 1984-02-18 日産自動車株式会社 窒化珪素質焼結体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188500A (en) * 1981-05-14 1982-11-19 Toshiba Corp Manufacturing apparatus for crystal of 3-5 group compound semiconductor
JPS5930766A (ja) * 1982-08-11 1984-02-18 日産自動車株式会社 窒化珪素質焼結体

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12426506B2 (en) 2019-07-19 2025-09-23 Evatec Ag Piezoelectric coating and deposition process

Also Published As

Publication number Publication date
JPH0545550B2 (enExample) 1993-07-09

Similar Documents

Publication Publication Date Title
JP2507479B2 (ja) ＳｉＣ−Ａｌ▲下２▼Ｏ▲下３▼複合焼結体及びその製造法
JP3076682B2 (ja) アルミナ系焼結体及びその製造方法
JP2573230B2 (ja) 窒化ケイ素系セラミックス
EP0365553A1 (en) PROCESS FOR PRODUCING CERAMIC COMPOSITE MATERIALS CONTAINING SILICON OXYNITRIDE AND ZIRCONIUM OXIDE.
JPS62207766A (ja) 窒化珪素焼結体の製造方法
JP2974473B2 (ja) 複合セラミックスおよびその製造法
JPS6186466A (ja) スピネル系セラミツクス
JPS6131071B2 (enExample)
JP2925089B2 (ja) セラミックス複合焼結体およびその製造方法
JPH10212157A (ja) アルミナ質焼結体およびその製造方法
JPS63100055A (ja) 高靭性を有するアルミナ基セラミックス製切削工具
JPH0526749B2 (enExample)
JP2910359B2 (ja) 窒化ケイ素質焼結体の製造方法
JP2854340B2 (ja) セラミックス複合焼結体およびその製造方法
JP3126059B2 (ja) アルミナ基複合焼結体
JPH01219062A (ja) 炭化珪素焼結体の製造方法
JP3241215B2 (ja) 窒化珪素質焼結体の製造方法
JPH08337476A (ja) 窒化珪素と炭化珪素の複合焼結体及びその製造方法
JPH0920552A (ja) アルミナ質焼結体及びその製造方法
JPS63147867A (ja) 窒化ケイ素焼結体の製造方法
JPH0517210A (ja) アルミナ基複合焼結体の製造方法及びアルミナ基複合焼結体
JPS6340768A (ja) 窒化ケイ素系セラミツクス
JPH02221160A (ja) 高密度窒化けい素質焼結体の製造方法
JPH0375505B2 (enExample)
JPH05194024A (ja) アルミナ基複合焼結体

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees