JPS62192248U - - Google Patents
Info
- Publication number
- JPS62192248U JPS62192248U JP7951486U JP7951486U JPS62192248U JP S62192248 U JPS62192248 U JP S62192248U JP 7951486 U JP7951486 U JP 7951486U JP 7951486 U JP7951486 U JP 7951486U JP S62192248 U JPS62192248 U JP S62192248U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- titanium oxide
- pair
- oxygen sensor
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の一実施例を示す概略構成図、
第２図は第１図の―断面図、第３図は第１図
の―断面図、第４図は従来例を示す概略構成
図、第５図は第４図の―断面図である。
１……基板、４……酸化チタン層、５……電源
、１０，１１……電極（負電極）、１２……電極
（正電極）。
FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention;
2 is a cross-sectional view of FIG. 1, FIG. 3 is a cross-sectional view of FIG. 1, FIG. 4 is a schematic configuration diagram showing a conventional example, and FIG. 5 is a cross-sectional view of FIG. 4. DESCRIPTION OF SYMBOLS 1... Substrate, 4... Titanium oxide layer, 5... Power supply, 10, 11... Electrode (negative electrode), 12... Electrode (positive electrode).
Claims (1)
タンを順次積層し、前記電極間に介在する酸化チ
タンの電気抵抗変化に基づいて酸素濃度を検出す
る酸素センサにおいて、前記一対の電極の相対面
積を負電極が正電極に比べ大きくなるように形成
したことを特徴する酸素センサ。 In an oxygen sensor that sequentially stacks a pair of opposing electrodes and titanium oxide on one side of a substrate and detects oxygen concentration based on a change in electrical resistance of the titanium oxide interposed between the electrodes, the relative area of the pair of electrodes is An oxygen sensor characterized in that the negative electrode is formed to be larger than the positive electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7951486U JPS62192248U (en) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7951486U JPS62192248U (en) | 1986-05-28 | 1986-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192248U true JPS62192248U (en) | 1987-12-07 |
Family
ID=30929443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7951486U Pending JPS62192248U (en) | 1986-05-28 | 1986-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192248U (en) |
-
1986
- 1986-05-28 JP JP7951486U patent/JPS62192248U/ja active Pending