JPS61170060U - - Google Patents
Info
- Publication number
- JPS61170060U JPS61170060U JP5211385U JP5211385U JPS61170060U JP S61170060 U JPS61170060 U JP S61170060U JP 5211385 U JP5211385 U JP 5211385U JP 5211385 U JP5211385 U JP 5211385U JP S61170060 U JPS61170060 U JP S61170060U
- Authority
- JP
- Japan
- Prior art keywords
- titania
- electrodes
- alumina
- oxygen sensor
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000843 powder Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は本考案の一実施例を示す酸素センサ要
部の断面図、第２図Ａ，Ｂは従来例を示す酸素セ
ンサ要部の断面図及び平面図、第３図はチタニア
の抵抗値と酸素濃度との関係を示す線図、第４図
は検出回路の回路図である。
１……アルミナ基板、２，３……電極、４……
チタニア層、５……チタニア―アルミナ溶射層。
Fig. 1 is a cross-sectional view of the main part of an oxygen sensor showing an embodiment of the present invention, Fig. 2 A and B are a cross-sectional view and a plan view of the main part of an oxygen sensor showing a conventional example, and Fig. 3 is the resistance value of titania. FIG. 4 is a diagram showing the relationship between oxygen concentration and oxygen concentration, and FIG. 4 is a circuit diagram of a detection circuit. 1... Alumina substrate, 2, 3... Electrode, 4...
Titania layer, 5... Titania-alumina sprayed layer.
Claims (1)
変化によつて酸素濃度を検出するようにした酸素
センサにおいて、アルミナ基板の一側にチタニア
―アルミナ粉を溶射してチタニア―アルミナ溶射
層を形成し、その上に所定の間隔をあけて２つの
電極を装着し、更に２つの電極を包覆する形でチ
タニア層を積層したことを特徴とする酸素センサ
。 In an oxygen sensor that detects oxygen concentration by changes in electrical resistance of a titania layer interposed between two electrodes, a titania-alumina sprayed layer is formed by spraying titania-alumina powder on one side of an alumina substrate. An oxygen sensor characterized in that two electrodes are mounted thereon at a predetermined interval, and a titania layer is further laminated to cover the two electrodes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5211385U JPS61170060U (en) | 1985-04-10 | 1985-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5211385U JPS61170060U (en) | 1985-04-10 | 1985-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61170060U true JPS61170060U (en) | 1986-10-22 |
Family
ID=30571770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5211385U Pending JPS61170060U (en) | 1985-04-10 | 1985-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61170060U (en) |
-
1985
- 1985-04-10 JP JP5211385U patent/JPS61170060U/ja active Pending