JPS6351269U - - Google Patents
Info
- Publication number
- JPS6351269U JPS6351269U JP14513386U JP14513386U JPS6351269U JP S6351269 U JPS6351269 U JP S6351269U JP 14513386 U JP14513386 U JP 14513386U JP 14513386 U JP14513386 U JP 14513386U JP S6351269 U JPS6351269 U JP S6351269U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- titanium oxide
- oxygen sensor
- electrodes
- surround
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 4
- 229910052760 oxygen Inorganic materials 0.000 claims description 4
- 239000001301 oxygen Substances 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第1図は本考案の一実施例を示す平面図、第2
図は酸素センサの従来例を示す平面図、第3図は
第2図の―矢視図である。
1…アルミナ基板、4…酸化チタン層、11…
+側電極、12…−側電極。
Figure 1 is a plan view showing one embodiment of the present invention;
The figure is a plan view showing a conventional example of an oxygen sensor, and FIG. 3 is a view taken along the - arrow in FIG. 1... Alumina substrate, 4... Titanium oxide layer, 11...
+ side electrode, 12...- side electrode.
Claims (1)
化チタンを順次積層し、前記電極間に介在する酸
化チタンの電気抵抗変化に基づいて酸素濃度を検
出する酸素センサにおいて、前記一方の電極と略
等距離を持つてかつ前記一方の電極を囲むように
、他方の電極を配設したことを特徴とする酸素セ
ンサ。 In an oxygen sensor, a pair of opposite electrodes and titanium oxide are successively laminated on one side of an insulating substrate, and the oxygen concentration is detected based on a change in the electrical resistance of the titanium oxide interposed between the electrodes. An oxygen sensor characterized in that the other electrode is arranged equidistantly and so as to surround the one electrode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14513386U JPS6351269U (en) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14513386U JPS6351269U (en) | 1986-09-24 | 1986-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6351269U true JPS6351269U (en) | 1988-04-06 |
Family
ID=31056390
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14513386U Pending JPS6351269U (en) | 1986-09-24 | 1986-09-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6351269U (en) |
-
1986
- 1986-09-24 JP JP14513386U patent/JPS6351269U/ja active Pending