JPS61202067U - - Google Patents
Info
- Publication number
- JPS61202067U JPS61202067U JP8630085U JP8630085U JPS61202067U JP S61202067 U JPS61202067 U JP S61202067U JP 8630085 U JP8630085 U JP 8630085U JP 8630085 U JP8630085 U JP 8630085U JP S61202067 U JPS61202067 U JP S61202067U
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- alumina substrate
- oxide layer
- oxygen sensor
- continuous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 6
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図Ａは本考案の第１実施例を示す断面図、
第１図Ｂは同上第１実施例を示す平面図、第２図
は本考案の第２実施例を示す断面図、第３図Ａは
従来例を示す断面図、第３図Ｂは同上従来例を示
す平面図である。
１０…アルミナ製基板、１１，１２…電極、１
３…貫通孔、１４，１５…酸化チタン層、１９…
酸素センサ。
FIG. 1A is a sectional view showing the first embodiment of the present invention;
Fig. 1B is a plan view showing the first embodiment of the above, Fig. 2 is a sectional view showing the second embodiment of the present invention, Fig. 3A is a sectional view showing the conventional example, and Fig. 3B is the conventional example of the above. FIG. 3 is a plan view showing an example. 10... Alumina substrate, 11, 12... Electrode, 1
3...Through hole, 14, 15...Titanium oxide layer, 19...
oxygen sensor.
Claims (1)
電極及び酸化チタンを順次積層してなり、前記２
つの電極間に介在される酸化チタン層の電気抵抗
変化によつて酸素濃度を検出するようにした酸素
センサにおいて、前記アルミナ製基板に貫通孔を
設けると共に、アルミナ製基板の他側にも酸化チ
タンを積層して、一側と他側の酸化チタン層を少
なくとも前記貫通孔によつて連続させたことを特
徴とする酸素センサ。 (2) 前記アルミナ製基板の端縁部において、一
側と他側の酸化チタン層を連続させたことを特徴
とする実用新案登録請求の範囲第１項記載の酸素
センサ。[Claims for Utility Model Registration] (1) A pair of opposing electrodes and titanium oxide are sequentially laminated on one side of an alumina substrate;
In an oxygen sensor that detects oxygen concentration by a change in electrical resistance of a titanium oxide layer interposed between two electrodes, a through hole is provided in the alumina substrate, and a titanium oxide layer is also provided on the other side of the alumina substrate. An oxygen sensor characterized in that the titanium oxide layers on one side and the other side are continuous through at least the through hole. (2) The oxygen sensor according to claim 1, wherein the titanium oxide layer on one side and the other side are continuous at the edge of the alumina substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8630085U JPS61202067U (en) | 1985-06-10 | 1985-06-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8630085U JPS61202067U (en) | 1985-06-10 | 1985-06-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61202067U true JPS61202067U (en) | 1986-12-18 |
Family
ID=30637479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8630085U Pending JPS61202067U (en) | 1985-06-10 | 1985-06-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61202067U (en) |
-
1985
- 1985-06-10 JP JP8630085U patent/JPS61202067U/ja active Pending