JPS6417460U - - Google Patents
Info
- Publication number
- JPS6417460U JPS6417460U JP11166087U JP11166087U JPS6417460U JP S6417460 U JPS6417460 U JP S6417460U JP 11166087 U JP11166087 U JP 11166087U JP 11166087 U JP11166087 U JP 11166087U JP S6417460 U JPS6417460 U JP S6417460U
- Authority
- JP
- Japan
- Prior art keywords
- alumina substrate
- oxygen sensor
- electrodes
- titania layer
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 150000002926 oxygen Chemical class 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 239000011265 semifinished product Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は本考案の一実施例の酸素センサを示す
断面図、第２図は該酸素センサの半完成品を示す
断面図、第３図ａ及びｂはそれぞれ従来の一例の
酸素センサを示す断面図及び正面図、第４図は酸
素濃度検出器の一例の検出回路図である。
図中、１……チタニア層、１ａ……酸化チタン
ペースト、２，３……電極、４……アルミナ基板
、５……接合層、５ａ……マグネシア薄膜。
FIG. 1 is a sectional view showing an oxygen sensor according to an embodiment of the present invention, FIG. 2 is a sectional view showing a semi-finished product of the oxygen sensor, and FIGS. 3 a and 3 b each show an example of a conventional oxygen sensor. A cross-sectional view, a front view, and FIG. 4 are detection circuit diagrams of an example of an oxygen concentration detector. In the figure, 1... titania layer, 1a... titanium oxide paste, 2, 3... electrode, 4... alumina substrate, 5... bonding layer, 5a... magnesia thin film.
Claims (1)
けるとともに該電極を包覆する形でチタニア層を
設けてなる酸素センサにおいて、アルミナ基板と
チタニア層の境界部に、それらの双方と化学的に
結合してなる接合層を設けたことを特徴とする積
層型酸素センサ。 In an oxygen sensor in which two electrodes are provided spaced apart on an alumina substrate and a titania layer is provided to cover the electrodes, a chemical bond between the alumina substrate and the titania layer is formed at the boundary between the alumina substrate and the titania layer. A laminated oxygen sensor characterized by having a bonding layer formed by bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11166087U JPH0521010Y2 (en) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11166087U JPH0521010Y2 (en) | 1987-07-21 | 1987-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6417460U true JPS6417460U (en) | 1989-01-27 |
| JPH0521010Y2 JPH0521010Y2 (en) | 1993-05-31 |
Family
ID=31349904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11166087U Expired - Lifetime JPH0521010Y2 (en) | 1987-07-21 | 1987-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521010Y2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09304321A (en) * | 1996-05-20 | 1997-11-28 | Denso Corp | Ceramic stack and its manufacture |
| JP2007101477A (en) * | 2005-10-07 | 2007-04-19 | Fuji Electric Fa Components & Systems Co Ltd | Thin film gas sensor |
| JP2008209390A (en) * | 2006-06-16 | 2008-09-11 | Ngk Spark Plug Co Ltd | Gas sensor |
| WO2009078370A1 (en) * | 2007-12-14 | 2009-06-25 | Ngk Spark Plug Co., Ltd. | Gas sensor |
| JP2009150885A (en) * | 2007-12-20 | 2009-07-09 | General Electric Co <Ge> | Gas sensor and method of making |
-
1987
- 1987-07-21 JP JP11166087U patent/JPH0521010Y2/ja not_active Expired - Lifetime
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09304321A (en) * | 1996-05-20 | 1997-11-28 | Denso Corp | Ceramic stack and its manufacture |
| JP2007101477A (en) * | 2005-10-07 | 2007-04-19 | Fuji Electric Fa Components & Systems Co Ltd | Thin film gas sensor |
| JP2008209390A (en) * | 2006-06-16 | 2008-09-11 | Ngk Spark Plug Co Ltd | Gas sensor |
| WO2009078370A1 (en) * | 2007-12-14 | 2009-06-25 | Ngk Spark Plug Co., Ltd. | Gas sensor |
| US8393196B2 (en) | 2007-12-14 | 2013-03-12 | Ngk Spark Plug Co., Ltd. | Gas sensor |
| JP5161210B2 (en) * | 2007-12-14 | 2013-03-13 | 日本特殊陶業株式会社 | Gas sensor |
| JP2009150885A (en) * | 2007-12-20 | 2009-07-09 | General Electric Co <Ge> | Gas sensor and method of making |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0521010Y2 (en) | 1993-05-31 |