JPH0521010Y2 - - Google Patents
Info
- Publication number
- JPH0521010Y2 JPH0521010Y2 JP11166087U JP11166087U JPH0521010Y2 JP H0521010 Y2 JPH0521010 Y2 JP H0521010Y2 JP 11166087 U JP11166087 U JP 11166087U JP 11166087 U JP11166087 U JP 11166087U JP H0521010 Y2 JPH0521010 Y2 JP H0521010Y2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- alumina substrate
- titania
- oxygen sensor
- titania layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 82
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 37
- 229910052760 oxygen Inorganic materials 0.000 claims description 37
- 239000001301 oxygen Substances 0.000 claims description 37
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 31
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 8
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 23
- 239000010409 thin film Substances 0.000 description 12
- 239000000395 magnesium oxide Substances 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 6
- 229910000505 Al2TiO5 Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- AABBHSMFGKYLKE-SNAWJCMRSA-N propan-2-yl (e)-but-2-enoate Chemical compound C\C=C\C(=O)OC(C)C AABBHSMFGKYLKE-SNAWJCMRSA-N 0.000 description 5
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010304 firing Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000011265 semifinished product Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- NDLPOXTZKUMGOV-UHFFFAOYSA-N oxo(oxoferriooxy)iron hydrate Chemical compound O.O=[Fe]O[Fe]=O NDLPOXTZKUMGOV-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は、酸素濃度の変化に対応して電気抵抗
が変わる酸化物半導体を用いた積層型酸素センサ
に関するものである。DETAILED DESCRIPTION OF THE PRESENTLY PREFERRED EMBODIMENTS [Industrial Application Field] The present invention relates to a stacked-type oxygen sensor using an oxide semiconductor whose electrical resistance changes in response to a change in oxygen concentration.
従来、空燃比制御装置に使用される酸素センサ
としては、例えば、特開昭55−137334号公報等に
記載されているように、検出素子としてジルコニ
ア（酸化ジルコニウム）を使用したものが広く知
られている。
Conventionally, as an oxygen sensor used in an air-fuel ratio control device, a sensor using zirconia (zirconium oxide) as a detection element is widely known, for example, as described in Japanese Patent Application Laid-open No. 137334/1983. ing.
しかし、このジルコニア系の酸素センサは、被
検出気体中酸素濃度と基準気体中酸素濃度との差
に応じた起電力を発生させるものであるため、基
準気体導入部が必要となつて、小型、軽量化に限
界があり、部品点数も多いこと等の不都合があつ
た。 However, since this zirconia-based oxygen sensor generates an electromotive force according to the difference between the oxygen concentration in the detected gas and the reference gas oxygen concentration, it requires a reference gas introduction part, and is small and small. There were disadvantages such as there was a limit to weight reduction and the number of parts was large.
そこで、これらの不都合を解消するものとして
酸素濃度に応じて電気抵抗値が直接変化するチタ
ニア（酸化チタン）を検出素子とした酸素センサ
が開発されている。 To solve these problems, an oxygen sensor has been developed in which the detection element is titania (titanium oxide) whose electrical resistance value changes directly depending on the oxygen concentration.
このチタニアを検出素子とする酸素センサとし
ては、例えば第３図ａ，ｂに示すような積層型構
造のものが最も一般的であり、次のように製造さ
れる。 The most common oxygen sensor using titania as a detection element is one with a laminated structure as shown in FIGS. 3a and 3b, for example, and is manufactured as follows.
すなわち、基板４として用いるアルミナ（Al2
O3）の仮焼結体の一側に電極２，３として用い
る白金（Pt）を所定の間隔をあけて塗布し、こ
れらを約1500℃で焼成する。更に、電極２，３を
包覆するようにチタニア（TiO2）を塗布して約
1200℃で焼成し、多孔性のチタニア層１を形成す
る。尚、アルミナ基板４の厚さは１mm程度、チタ
ニア層４の厚さは200μ程度である。 That is, alumina (Al 2
Platinum (Pt) to be used as electrodes 2 and 3 is applied at a predetermined interval to one side of the pre-sintered body of O 3 ), and these are fired at about 1500°C. Furthermore, titania (TiO 2 ) is applied so as to cover electrodes 2 and 3.
The porous titania layer 1 is formed by firing at 1200°C. The thickness of the alumina substrate 4 is about 1 mm, and the thickness of the titania layer 4 is about 200 μm.
かかる構成の酸素センサによると、電極間に介
在するチタニア層の電気抵抗値が酸素濃度によつ
て変化するので、その抵抗値変化を第４図に示す
回路によつて電圧変化として取出すことで、酸素
濃度を検出することができる。なお、第４図中、
R1はセンサ抵抗（チタニア層による電気抵抗）、
R2は比較抵抗、Vcは印加電圧源、Voutは出力電
圧測定端子である。 According to the oxygen sensor having such a configuration, the electrical resistance value of the titania layer interposed between the electrodes changes depending on the oxygen concentration, so by extracting the resistance value change as a voltage change using the circuit shown in FIG. Oxygen concentration can be detected. In addition, in Figure 4,
R 1 is the sensor resistance (electrical resistance due to the titania layer),
R2 is a comparison resistor, Vc is an applied voltage source, and Vout is an output voltage measurement terminal.
しかしながら、上記の酸素センサにあつて、ア
ルミナ基板とチタニア層とは、夫々焼成温度が違
いまた材料が異なることから付着強度が弱く、温
度サイクル等の影響により積層境界部に剥離が発
生し易いという問題点があつた。このように剥離
が生じ、特にそれが２つの電極間を連通するもの
であつた場合、カーボンの付着によりリークが起
き、酸素濃度を正常に検出することができなくな
る惧れがある。
However, in the above oxygen sensor, the alumina substrate and the titania layer are fired at different temperatures and are made of different materials, so the adhesion strength is weak, and peeling is likely to occur at the lamination boundary due to temperature cycles, etc. There was a problem. If peeling occurs in this way, and especially if the peeling occurs between two electrodes, there is a risk that leakage will occur due to adhesion of carbon, making it impossible to normally detect the oxygen concentration.
そこで上記欠点を防止する工夫をした酸素セン
サが幾つか提案されており、その主なものとし
て、電極・多孔性チタニア層とアルミナ基板と
の間に緻密なチタニア層を設けたもの（実開昭61
−149866号）、チタニア層とアルミナ基板との
間にチタニア−アルミナ溶射層を形成させたもの
（実開昭61−170060）、アルミナ基板に凹所を設
けその底面に一対の電極を形成しチタニア層を埋
設したもの（実開昭61−170061号）、アルミナ
基板のチタニア層コーテイング面を、断面くさび
部分を設けた形状としたもの（実開昭61−173059
号）がある。 Therefore, several oxygen sensors have been proposed that have been devised to prevent the above-mentioned drawbacks. 61
-149866), a titania-alumina sprayed layer is formed between the titania layer and the alumina substrate (Utility Model Application No. 61-170060), a recess is formed in the alumina substrate, and a pair of electrodes are formed on the bottom surface of the titania layer. (Utility Model Application No. 61-170061), and one in which the titania layer coating surface of the alumina substrate has a wedge section (Utility Model Application No. 61-173059).
No.).
しかし、それらの酸素センサも上記欠点を十分
に解消したものと云うことはできない。即ち、上
記及びの酸素センサはアルミナ基板とチタ
ニア層の結合が主としてアンカー効果でなる機械
的な結合であるため、自動車排気ガスの過酷な環
境下、即ち急激な温度変化や長期の熱変化サイク
ルのもとでは熱膨張差による歪みに耐えきれずに
剥離に至る可能性がある。また密着性が不充分で
あるためチタニア層とアルミナ基板に隙間を生じ
易く、カーボンリークを皆無にすることはできな
い。一方、上記の酸素センサは、表面の粗いチ
タニア・アルミナ溶射層の介在により付着強度は
向上するが、生成物としてチタン酸アルミニウム
（Al2TiO5）を生じる。このチタン酸アルミニウ
ムは低強度で脆い性質を有し、その結果アルミナ
基板とチタニア層の結合強度を低下させることと
なり、剥離を完全に防ぎ得ない。 However, these oxygen sensors cannot be said to fully eliminate the above-mentioned drawbacks. In other words, in the oxygen sensors mentioned above, the bond between the alumina substrate and the titania layer is a mechanical bond mainly due to the anchor effect, so it cannot be used in the harsh environment of automobile exhaust gas, that is, due to sudden temperature changes and long-term thermal change cycles. However, it may not be able to withstand the strain caused by the difference in thermal expansion, leading to peeling. Furthermore, due to insufficient adhesion, gaps are likely to be formed between the titania layer and the alumina substrate, making it impossible to completely eliminate carbon leakage. On the other hand, although the above oxygen sensor improves adhesion strength due to the presence of a titania/alumina sprayed layer with a rough surface, aluminum titanate (Al 2 TiO 5 ) is produced as a product. This aluminum titanate has low strength and brittle properties, and as a result, the bonding strength between the alumina substrate and the titania layer is reduced, and peeling cannot be completely prevented.
本考案は上記問題点に鑑みてなされたものであ
り、その目的とするところは、アルミナ基板とチ
タニア層との剥離を防止し、カーボンリークの発
生を未然に防ぐことにより、酸素濃度の検出が長
期に亘つて安定して行える酸素センサを提供する
ことである。 The present invention was developed in view of the above problems, and its purpose is to prevent the alumina substrate from peeling off from the titania layer and prevent carbon leakage, thereby making it possible to detect oxygen concentration. An object of the present invention is to provide an oxygen sensor that can operate stably over a long period of time.
本考案は、上記目的を達成するため、アルミナ
基板上に間隔をあけて二本の電極を設けるととも
に該電極を包覆する形でチタニア層を設けてなる
酸素センサにおいて、アルミナ基板とチタニア層
の境界部に、それらの双方と化学的に結合してな
る非Al2O3−TiO2系接合層を設けたことを特徴と
する。
In order to achieve the above object, the present invention provides an oxygen sensor in which two electrodes are provided at an interval on an alumina substrate, and a titania layer is provided to cover the electrodes. It is characterized in that a non-Al 2 O 3 -TiO 2 -based bonding layer chemically bonded to both of them is provided at the boundary.
上記の「それらの双方と化合的に結合してなる
非Al2O3−TiO2系接合層」というのは、一方でア
ルミナ基板と反応し他方でチタニア層と反応し
た、いわばAl2O3反応層−未反応層−TiO2反応層
の三層様構造を有するものであり、亀裂を起こし
易いチタン酸アルミニウムが存在していないこと
が重要である。 The above-mentioned "non-Al 2 O 3 -TiO 2 -based bonding layer formed by chemically bonding with both of them" refers to Al 2 O 3 that has reacted with the alumina substrate on the one hand and the titania layer on the other hand. It has a three-layer structure of a reacted layer - an unreacted layer - a TiO 2 reaction layer, and it is important that aluminum titanate, which tends to cause cracks, is not present.
この接合層を有する酸素センサを製造するに
は、アルミナ基板上に電極を設けるとともに該基
板とチタニア層の界面にあたる部分に、アルミナ
にもチタニアにも反応性を示し且つアルミニウム
（Al）とチタン（Ti）を含まない物質の薄膜を形
成した後、チタニア層を積層し焼成すればよい。 In order to manufacture an oxygen sensor with this bonding layer, an electrode is provided on an alumina substrate, and at the interface between the substrate and the titania layer, a layer of aluminum (Al) and titanium ( After forming a thin film of a material that does not contain Ti, a titania layer is deposited and fired.
上記薄膜のための物質としては、マグネシア
（MgO）、酸化第二鉄（Fe2O3）、ベリリア
（BeO）等が挙げられる。膜厚は満足いく接合層
が得られる限り薄い方が良く、特に1μ以下が好
ましい。そのような薄膜の形成方法として、スパ
ツタリング、イオンプレーテイング等が挙げられ
る。焼成は常法に従つて行なつてよい。AlとTi
を含まない薄膜は焼成時に脆いチタン酸アルミニ
ウムを生成しない。 Examples of materials for the thin film include magnesia (MgO), ferric oxide (Fe 2 O 3 ), and beryllia (BeO). The film thickness is preferably as thin as possible as long as a satisfactory bonding layer can be obtained, particularly preferably 1 μm or less. Examples of methods for forming such a thin film include sputtering and ion plating. Firing may be performed according to a conventional method. Al and Ti
Thin films that do not contain aluminum do not produce brittle aluminum titanate during firing.
アルミナ基板とチタニア層の間に形成されてい
る薄膜が焼成過程においてアルミナ基板及びチタ
ニア層の双方と反応し、非Al2O3−TiO2系接合層
となる。
The thin film formed between the alumina substrate and the titania layer reacts with both the alumina substrate and the titania layer during the firing process, forming a non - Al2O3 - TiO2 bonding layer.
この接合層を有する本考案の酸素センサは、ア
ルミナ基板と接合層、並びに接合層とチタニア層
がいずれも相互に物質拡散（反応層の生成）によ
り結合しているため、アルミナ基板とチタニア層
は接合層を介して強固に密着する。また接合層は
アルミナ基板とチタニア層の熱応力差を緩和する
ため剥離を生じさせない。 In the oxygen sensor of the present invention having this bonding layer, the alumina substrate and the bonding layer, as well as the bonding layer and the titania layer, are bonded to each other by material diffusion (generation of a reaction layer). Strongly adheres through the bonding layer. Furthermore, the bonding layer alleviates the thermal stress difference between the alumina substrate and the titania layer, so that peeling does not occur.
以下に本考案の酸素センサの一実施例を図面に
基づいて説明する。
An embodiment of the oxygen sensor of the present invention will be described below based on the drawings.
第１図は本実施例の酸素センサの断面を示して
いる。第３図ａと比較して判るように、構造上従
来と異なるところはアルミナ基板４と、一対の電
極２，３及びチタニア層１との間に非Al2O3−
TiO2系接合層５が存在することである。該接合
層５は、アルミナ基板４及びチタニア層１の双方
と化学的に結合しているため、長期にわたる過酷
な熱変化環境下においてもアルミナ基板４とチタ
ニア層の密着性が保たれ、剥離が起こらないセン
サとなつている。かかる構成の酸素センサの製造
方法を第２図を用いて説明する。 FIG. 1 shows a cross section of the oxygen sensor of this example. As can be seen from a comparison with FIG. 3a, the difference in structure from the conventional one is that non-Al 2 O 3 −
The TiO 2 -based bonding layer 5 is present. Since the bonding layer 5 is chemically bonded to both the alumina substrate 4 and the titania layer 1, the adhesion between the alumina substrate 4 and the titania layer is maintained even under severe thermal change environments over a long period of time, and peeling is prevented. It is a sensor that does not occur. A method of manufacturing an oxygen sensor having such a configuration will be explained using FIG. 2.
第２図に示すものは焼成されて本実施例の酸素
センサとなる半完成品であり、次のようにして製
造される。まずAl2O3焼結体でできたアルミナ基
板４上に、MgOのスパツタリングにより、厚さ
0.5μのマグネシア薄膜５を形成させる。その際、
後で電極２，３を設けることになる部分はマスキ
ングしておく。マスキングにより生じたマグネシ
ア薄膜の存在しない領域に白金（Pt）製の電極
２，３を印刷し、次いで該電極２，３を包覆する
ようにマグネシア薄膜５ａ上に酸化チタンペース
ト１ａを塗布することにより、第２図で示される
半完成品になる。それを1300℃で焼成すると、酸
化チタンペースト１ａが焼結されて多孔質チタニ
ア層１（第１図）となり、白金電極２，３が基板
４及びチタニア層１に焼付けられるとともに、マ
グネシア薄膜５ａとアルミナ基板４の界面で
MgOとAl2O3の拡散反応が、またマグネシア薄膜
５ａと酸化チタンペースト１ａないしチタニア層
１の界面でMgOとTiO2の拡散反応が起こる。こ
うしてチタニア層１とアルミナ基板４の間に接合
層５が形成された本実施例の酸素センサが得られ
る。厚さ0.5μのマグネシア薄膜から生成した接合
層５は非常に薄い（層厚＜1μ）ため、本来のセ
ンサ機能に影響を及ぼさない。 What is shown in FIG. 2 is a semi-finished product that is fired to become the oxygen sensor of this embodiment, and is manufactured as follows. First, MgO is sputtered onto an alumina substrate 4 made of an Al 2 O 3 sintered body to give a thickness of
A magnesia thin film 5 of 0.5μ is formed. that time,
Portions where electrodes 2 and 3 will be provided later are masked. Platinum (Pt) electrodes 2 and 3 are printed in the area where the magnesia thin film does not exist due to masking, and then titanium oxide paste 1a is applied on the magnesia thin film 5a so as to cover the electrodes 2 and 3. As a result, the semi-finished product shown in FIG. 2 is obtained. When it is fired at 1300°C, the titanium oxide paste 1a is sintered to form a porous titania layer 1 (Fig. 1), platinum electrodes 2 and 3 are baked onto the substrate 4 and titania layer 1, and a magnesia thin film 5a is formed. At the interface of alumina substrate 4
A diffusion reaction between MgO and Al 2 O 3 occurs, and a diffusion reaction between MgO and TiO 2 occurs at the interface between the magnesia thin film 5a and the titanium oxide paste 1a or the titania layer 1. In this way, the oxygen sensor of this example in which the bonding layer 5 is formed between the titania layer 1 and the alumina substrate 4 is obtained. The bonding layer 5 formed from a magnesia thin film with a thickness of 0.5μ is very thin (layer thickness<1μ) and does not affect the original sensor function.
以下の説明から明らかなように本考案によれば
アルミナ基板とチタニア層とが、共に非Al2O3−
TiO2系接合層例えばマグネシアとの反応層を介
して化学的に結合するため、従来の機械的アンカ
ー効果によりアルミナ基板とチタニア層を付着さ
せていた酸素センサに比べ、より強固に密着した
積層型酸素センサとなる。
As is clear from the following explanation, according to the present invention, both the alumina substrate and the titania layer are non-Al 2 O 3 −
Because it is chemically bonded via a TiO 2 -based bonding layer, such as a reaction layer with magnesia, it is a laminated type that has a stronger adhesion compared to conventional oxygen sensors in which the alumina substrate and titania layer are attached using a mechanical anchor effect. It becomes an oxygen sensor.
またアルミナ基板とチタニア層が直接接触して
いないため、強度低下の原因となるチタン酸アル
ミニウムの生成を防止でき、このことからも密着
強度を維持し、耐久性を大巾に向上させることが
できる。 Additionally, since the alumina substrate and titania layer are not in direct contact, it is possible to prevent the formation of aluminum titanate, which causes a decrease in strength. This also maintains adhesion strength and greatly improves durability. .
従つて自動車排気ガス中の使用におけるアルミ
ナ基板とチタニア層の剥離の発生によるカーボン
リークを防止でき、長期に亘つて安定して正確な
酸素濃度を検出することができる。 Therefore, carbon leakage due to separation of the alumina substrate and titania layer when used in automobile exhaust gas can be prevented, and oxygen concentration can be detected stably and accurately over a long period of time.
第１図は本考案の一実施例の酸素センサを示す
断面図、第２図は該酸素センサの半完成品を示す
断面図、第３図ａ及びｂはそれぞれ従来の一例の
酸素センサを示す断面図及び正面図、第４図は酸
素濃度検出器の一例の検出回路図である。
図中、１……チタニア層、１ａ……酸化チタン
ペースト、２，３……電極、４……アルミナ基
板、５……接合層、５ａ……マグネシア薄膜。
FIG. 1 is a sectional view showing an oxygen sensor according to an embodiment of the present invention, FIG. 2 is a sectional view showing a semi-finished product of the oxygen sensor, and FIGS. 3 a and 3 b each show an example of a conventional oxygen sensor. A cross-sectional view, a front view, and FIG. 4 are detection circuit diagrams of an example of an oxygen concentration detector. In the figure, 1... titania layer, 1a... titanium oxide paste, 2, 3... electrode, 4... alumina substrate, 5... bonding layer, 5a... magnesia thin film.
Claims (1)
けるとともに該電極を包覆する形でチタニア層を
設けてなる酸素センサにおいて、アルミナ基板と
チタニア層の境界部に、それらの双方と化学的に
結合してなる非Al2O3−TiO2系接合層を設けたこ
とを特徴とする積層型酸素センサ。 In an oxygen sensor in which two electrodes are provided spaced apart on an alumina substrate and a titania layer is provided to cover the electrodes, a chemical bond between the alumina substrate and the titania layer is formed at the boundary between the alumina substrate and the titania layer. A multilayer oxygen sensor characterized by having a non-Al 2 O 3 -TiO 2 bonding layer formed by bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11166087U JPH0521010Y2 (en) | 1987-07-21 | 1987-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11166087U JPH0521010Y2 (en) | 1987-07-21 | 1987-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6417460U JPS6417460U (en) | 1989-01-27 |
| JPH0521010Y2 true JPH0521010Y2 (en) | 1993-05-31 |
Family
ID=31349904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11166087U Expired - Lifetime JPH0521010Y2 (en) | 1987-07-21 | 1987-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0521010Y2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3692623B2 (en) * | 1996-05-20 | 2005-09-07 | 株式会社デンソー | Ceramic laminate and manufacturing method thereof |
| JP4845469B2 (en) * | 2005-10-07 | 2011-12-28 | 富士電機株式会社 | Thin film gas sensor |
| JP5021377B2 (en) * | 2006-06-16 | 2012-09-05 | 日本特殊陶業株式会社 | Gas sensor |
| KR20100101046A (en) | 2007-12-14 | 2010-09-16 | 니혼도꾸슈도교 가부시키가이샤 | Gas sensor |
| US7827852B2 (en) * | 2007-12-20 | 2010-11-09 | General Electric Company | Gas sensor and method of making |
-
1987
- 1987-07-21 JP JP11166087U patent/JPH0521010Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6417460U (en) | 1989-01-27 |
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