JPH0522859Y2 - - Google Patents
Info
- Publication number
- JPH0522859Y2 JPH0522859Y2 JP17915087U JP17915087U JPH0522859Y2 JP H0522859 Y2 JPH0522859 Y2 JP H0522859Y2 JP 17915087 U JP17915087 U JP 17915087U JP 17915087 U JP17915087 U JP 17915087U JP H0522859 Y2 JPH0522859 Y2 JP H0522859Y2
- Authority
- JP
- Japan
- Prior art keywords
- oxygen concentration
- ceramic
- green sheet
- ceramic green
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000919 ceramic Substances 0.000 claims description 46
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 28
- 238000001514 detection method Methods 0.000 claims description 28
- 239000001301 oxygen Substances 0.000 claims description 28
- 229910052760 oxygen Inorganic materials 0.000 claims description 28
- 239000004065 semiconductor Substances 0.000 description 8
- 229910010413 TiO 2 Inorganic materials 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- 238000005219 brazing Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007606 doctor blade method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Description
【考案の詳細な説明】
〔産業上の利用分野〕
本考案は抵抗検出型酸素濃度検出器の酸素濃度
検出素子に関するものである。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an oxygen concentration detection element of a resistance detection type oxygen concentration detector.
自動車の内燃機関やボイラー等に使用される酸
素濃度検出器の素子の一つに、TiO2に代表され
るＮ型酸化物半導体を使用し、酸素濃度の変化に
対応する抵抗値の変化を検出する抵抗検出型酸素
濃度検出素子がある。この素子は、ZrO2に代表
される固体電解質を使用し、酸素濃度の濃淡差に
よる起電力を検出する濃淡電池型酸素濃度検出素
子に比べて構造が簡略であり、設計の自由度が大
きく、軽量化、感度の向上及びコストの低減等を
達成する上で有利である。
One of the elements of oxygen concentration detectors used in automobile internal combustion engines and boilers uses N-type oxide semiconductors such as TiO 2 to detect changes in resistance value in response to changes in oxygen concentration. There is a resistance detection type oxygen concentration detection element. This element uses a solid electrolyte such as ZrO 2 and has a simpler structure than a concentration cell type oxygen concentration detection element, which detects electromotive force due to the difference in oxygen concentration, and has a greater degree of freedom in design. This is advantageous in achieving weight reduction, improved sensitivity, and cost reduction.
具体的な抵抗検出型酸素濃度検出素子としては
例えば、Al2O3等のセラミツクスグリーンシー
ト、TiO2のようなＮ型酸化物半導体及びPtから
なるヒータをそれぞれスクリーン印刷することに
より厚膜を形成し、これらを積層して焼成するこ
とにより形成される厚膜積層型素子が考案されて
いる。 As a specific resistance detection type oxygen concentration detection element, for example, a thick film is formed by screen printing a ceramic green sheet such as Al 2 O 3 , an N-type oxide semiconductor such as TiO 2 , and a heater made of Pt. However, a thick film laminated type element formed by laminating these materials and firing them has been devised.
又、実開昭62−37757号公報にはヒータを形成
したセラミツクスグリーンシート並びに感応部と
リード線を形成したセラミツクスグリーンシート
を、周側面に所定の大きさの開口部を設けたセラ
ミツクス製円筒支持体の外周に、前記ヒータ及び
感応部が該開口部に位置するように各グリーンシ
ートを被覆し、焼成することにより形成した抵抗
検出型酸素濃度検出素子が記載されている。第９
図ないし第１１図にこの素子の一例を示す。第９
図は酸素濃度検出素子１においてセラミツクスグ
リーンシート４，５をセラミツクス製支持体２へ
被覆する工程を示す斜視図である。図中外に、
３，１２は窓、６はリード線保護用シートを示
す。又、第１０図はヒータ７をスクリーン印刷し
てヒータ部８を形成し、同様にしてリード線１１
を形成したセラミツクスグリーンシート４の平面
図である。更に第１１図は酸化物（TiO2）半導
体９及びリード線１１を印刷して感応部１０を形
成したセラミツクスグリーンシート５の平面図で
ある。 Furthermore, Japanese Utility Model Application Publication No. 62-37757 discloses a ceramic green sheet on which a heater is formed, a ceramic green sheet on which a sensitive part and a lead wire are formed, and a ceramic cylindrical support having an opening of a predetermined size on the circumferential side. A resistance detection type oxygen concentration detection element is described, which is formed by covering each green sheet around the outer periphery of the body so that the heater and the sensing part are located in the opening, and then firing it. 9th
An example of this element is shown in Figures 1 through 11. 9th
The figure is a perspective view showing the process of coating ceramic green sheets 4 and 5 onto ceramic support 2 in oxygen concentration detection element 1. Outside the diagram,
3 and 12 are windows, and 6 is a lead wire protection sheet. In addition, in FIG. 10, the heater part 8 is formed by screen printing the heater 7, and the lead wire 11 is formed in the same manner.
FIG. 4 is a plan view of a ceramic green sheet 4 formed with . Furthermore, FIG. 11 is a plan view of a ceramic green sheet 5 on which a sensitive portion 10 is formed by printing an oxide (TiO 2 ) semiconductor 9 and lead wires 11.
上記従来技術において厚膜積層型素子は車載用
酸素濃度検出器としては片持式で保持する構造を
とるため排出ガス流や振動により折損することが
ある。そのため強度補強策として基板を厚くする
と軽量化及び温度の立上り特性を阻害する。又、
組み付け性においても断面が長方形のため素子を
固定するホルダーの加工が難しくなり、コストア
ツプにつながる。円筒状の素子では上記不具合が
解消されるが、セラミツクスグリーンシートを円
筒状支持体の外周に巻きつけ密着させるには専用
の圧着治具を必要とし、製造が容易ではない。
In the above-mentioned prior art, the thick film laminated type element has a structure in which it is held in a cantilevered manner as an on-vehicle oxygen concentration detector, so it may break due to exhaust gas flow or vibration. Therefore, if the substrate is made thicker as a strength reinforcement measure, weight reduction and temperature rise characteristics will be hindered. or,
In terms of ease of assembly, the rectangular cross section makes it difficult to process the holder that fixes the element, leading to increased costs. Although a cylindrical element solves the above-mentioned problems, it requires a special pressure bonding jig to wrap the ceramic green sheet around the outer periphery of the cylindrical support and bring it into close contact, and is not easy to manufacture.
本考案は上記従来技術における問題点を解決す
るためのものであり、その目的とするところは製
造及び組み付けが容易でかつ昇温特性及び耐久性
に優れた抵抗検出型酸素濃度検出素子を提供する
ことにある。 The present invention is intended to solve the problems in the prior art described above, and its purpose is to provide a resistance detection type oxygen concentration detection element that is easy to manufacture and assemble, and has excellent temperature rise characteristics and durability. There is a particular thing.
すなわち本考案の抵抗検出型酸素濃度検出素子
は、セラミツクス製円柱状支持体に円柱軸方向に
平面部を設け、該平面部上に酸素濃度検出部、電
極及びヒータを形成したセラミツクスグリーンシ
ートを積層し焼成して、セラミツクスシートを前
記セラミツクス製円柱状支持体の平面部と一体に
形成して素子と成したことを特徴とする。
That is, the resistance detection type oxygen concentration sensing element of the present invention has a ceramic cylindrical support provided with a flat part in the axial direction of the cylinder, and a ceramic green sheet on which an oxygen concentration sensing part, an electrode, and a heater are formed is laminated on the flat part. The present invention is characterized in that the ceramic sheet is formed integrally with the flat part of the ceramic cylindrical support by firing and forming an element.
セラミツクス製円柱状支持体はアルミナ（Al2
O3）などを用いて製造する。 The ceramic cylindrical support is made of alumina (Al 2
O 3 ), etc.
平面部は円柱状支持体の一端部又は中間部に設
ける。又は、平面部を設けるための円柱状支持体
の切り欠きの程度は、円柱軸に直交する方向の断
面の半分を切り欠いてもよいし、一部を切り欠い
てもよい。平面部の端部において円柱軸に直交す
る方向の断面形状が急変することによる応力の集
中を防ぐため、平面部の端部においてゆるやかに
断面形状が変化するようにするとよい。 The flat part is provided at one end or middle part of the cylindrical support. Alternatively, the extent of the cutout of the cylindrical support for providing the plane portion may be such that half or a portion of the cross section in the direction perpendicular to the cylinder axis is cut out. In order to prevent concentration of stress due to a sudden change in the cross-sectional shape in the direction perpendicular to the cylinder axis at the end of the flat part, it is preferable that the cross-sectional shape changes gradually at the end of the flat part.
セラミツクスグリーンシートとしては、円柱状
支持体に使用されるセラミツクス材料と同組成の
材料を使用すると、焼成時の歪み、割れ等を防止
することができ、有利である。例えばセラミツク
ス製円柱状支持体の材料としてAl2O3を使用する
場合、セラミツクスグリーンシートとしては、
Al2O3粉末を適当な樹脂に分散し、混練した後、
所定の厚さのシートに成形したものを使用すると
よい。 It is advantageous to use a material having the same composition as the ceramic material used for the cylindrical support as the ceramic green sheet, since this can prevent distortion, cracking, etc. during firing. For example, when using Al 2 O 3 as the material for a ceramic cylindrical support, the ceramic green sheet is
After dispersing Al 2 O 3 powder in a suitable resin and kneading it,
It is preferable to use a sheet formed into a predetermined thickness.
酸素濃度検出部にはTiO2，Nb2O5等のＮ型酸
化物半導等を使用し得るが、代表的にはTiO2で
ある。 Although N-type oxide semiconductors such as TiO 2 and Nb 2 O 5 can be used for the oxygen concentration detection section, TiO 2 is typically used.
酸素濃度検出部、電極及びヒータは一枚のセラ
ミツクスグリーンシートに形成してもよいし別の
セラミツクスグリーンシートに形成してもよい。 The oxygen concentration detection section, electrodes, and heater may be formed on one ceramic green sheet or on separate ceramic green sheets.
一枚のセラミツクスグリーンシートを使用する
場合には同一面に酸素濃度検出部、電極及びヒー
タを形成してもよいしヒータを反対の面に形成し
てもよい。又、二枚のセラミツクスグリーンシー
トを使用して、例えば一枚の酸素濃度検出部及び
電極を形成し、他の一枚にヒータを形成してもよ
い。 When a single ceramic green sheet is used, the oxygen concentration detection section, electrode, and heater may be formed on the same surface, or the heater may be formed on the opposite surface. Alternatively, two ceramic green sheets may be used, for example, one sheet may form an oxygen concentration detection section and an electrode, and the other sheet may form a heater.
セラミツクスグリーンシートは酸素濃度検出部
及び電極を形成した面を外気と接触するように外
側に向けて円柱状支持体の平面部に積層し、焼成
して、セラミツクスシートをセラミツクス製円柱
状支持体の平面部と一体に形成して素子と成す。 The ceramic green sheet is laminated on the flat part of the cylindrical support with the surface on which the oxygen concentration detection part and the electrodes are formed facing outward so as to be in contact with the outside air, and is fired to form the ceramic sheet onto the cylindrical ceramic support. It is formed integrally with the plane part to form an element.
電極及びヒータにはPtなどのリード線を接続
する。又、素子を保護するために素子にセラミツ
クス溶射コーテイングなどによる保護層を形成す
るとよい。 Connect lead wires such as Pt to the electrodes and heater. Further, in order to protect the element, a protective layer such as ceramic spray coating may be formed on the element.
上記構成とすることにより、厚膜積層型素子の
利点を有しながら強度が大きく組み付けが容易で
あり、かつ円筒状素子に比べて製造が容易な酸素
濃度検出素子を得ることができる。
With the above configuration, it is possible to obtain an oxygen concentration detection element that has the advantages of a thick film stacked element, has high strength, is easy to assemble, and is easier to manufacture than a cylindrical element.
以下の実施例において本考案を更に詳細に説明
する。なお、本考案は下記実施例に限定されるも
のではない。
The invention will be explained in more detail in the following examples. Note that the present invention is not limited to the following examples.
実施例 １
第１図に本考案の酸素濃度検出素子の第１実施
例の平面図を示す。アルミナ製円柱状支持体１３
の一端に円柱軸方向に平面部１４を設け、そこに
第２図に示すように一面に酸化物（TiO2）半導
体１５及びPt電極１６をスクリーン印刷し、第
３図に示すように他面にPtヒータ１７をスクリ
ーン印刷したセラミツクスグリーンシート１８
を、酸化物半導体１５部分が被測定ガスと接する
ように外側に向けて積層、圧着した後焼成する。
第４図は上記素子の正面図、第５図は右側面図を
示す。Pt電極１６及びPtヒータ１７からのリー
ド線１９，２０の取り出しは、第４図のように円
柱状支持体１３の側面に溝を設け、ろう付けによ
り行う。このように構成した素子は排気ガスに対
して使用する場合、Pt電極１６及び酸化物半導
体１５の劣化そ防ぐため、スピネル（平均粒径25
〜75μm）粉末をセラミツク溶射コーテイングす
ることにより保護層２１（第１図、第４図及び第
５図中２点鎖線を示す）を形成する。Example 1 FIG. 1 shows a plan view of a first example of the oxygen concentration detection element of the present invention. Alumina columnar support 13
A flat part 14 is provided at one end in the direction of the cylinder axis, and an oxide (TiO 2 ) semiconductor 15 and a Pt electrode 16 are screen printed on one side as shown in FIG. 2, and on the other side as shown in FIG. Ceramics green sheet 18 with Pt heater 17 screen printed on
are laminated and pressed outward so that the oxide semiconductor 15 portion comes into contact with the gas to be measured, and then fired.
FIG. 4 shows a front view of the above element, and FIG. 5 shows a right side view. The lead wires 19 and 20 are taken out from the Pt electrode 16 and the Pt heater 17 by providing grooves in the side surface of the cylindrical support 13 and brazing them as shown in FIG. When the element configured in this way is used against exhaust gas, spinel (average particle size 25
A protective layer 21 (indicated by a two-dot chain line in FIGS. 1, 4, and 5) is formed by applying a ceramic thermal spray coating to the powder (up to 75 μm).
上記において、セラミツクスグリーンシート１
８は焼成時の歪、割れ等を防ぐため円柱状支持体
１３と同一組成であるアルミナを使用することが
望ましく、アルミナ粉末に、バインダー、溶媒、
可塑剤及び解膠剤を加え混合したスラリーから主
にドクターブレード法により成形する。 In the above, ceramic green sheet 1
8 is preferably made of alumina having the same composition as the columnar support 13 in order to prevent distortion, cracking, etc. during firing.
Molding is performed mainly by the doctor blade method from a slurry mixed with a plasticizer and deflocculant.
実施例 ２
第６図に本考案の素子の第２実施例の正面図を
示す。本実施例は平面部１４において円柱状支持
体１３の円柱軸に直交する方向の断面形状が急変
して応力が集中しないように傾斜部２２を設けた
ものである。Example 2 FIG. 6 shows a front view of a second example of the device of the present invention. In this embodiment, an inclined part 22 is provided in the flat part 14 so that the cross-sectional shape of the cylindrical support 13 in the direction perpendicular to the cylinder axis does not suddenly change and stress is not concentrated.
実施例 ３
第７図及び第８図に本考案の素子の第３実施例
の正面図及び右側面図を示す。本実施例は円柱状
支持体１３の円柱軸に直交する方向の断面を半分
よりも少なく切り欠いて平面部１４を形成するこ
とにより強度の低下を防ぐものである。Embodiment 3 FIGS. 7 and 8 show a front view and a right side view of a third embodiment of the device of the present invention. In this embodiment, a reduction in strength is prevented by cutting out less than half of the cross section of the cylindrical support 13 in the direction perpendicular to the cylinder axis to form the flat portion 14.
上述の如く、本考案の酸素濃度検出素子はセラ
ミツクス製円柱状支持体に円柱軸方向に平面部を
設け、該平面部上に酸素濃度検出部、電極及びヒ
ータを形成したセラミツクスグリーンシートを積
層し焼成して、セラミツクスシートを前記セラミ
ツクス製円柱状支持体の平面部と一体に形成して
素子と成したものであるため、従来の厚膜積層型
素子の昇温特性の利点を失うことなくそれよりも
素子強度を向上させることができるので耐久性に
優れている。又、支持体が円柱状であるため、素
子を固定するホルダー側の加工がドリルによる穿
孔のみでよく、極めて簡単になる。
As mentioned above, the oxygen concentration detection element of the present invention has a ceramic cylindrical support with a flat part in the axial direction of the cylinder, and a ceramic green sheet on which an oxygen concentration detection part, an electrode, and a heater are formed is laminated on the flat part. Since the element is formed by firing the ceramic sheet and integrally forming the flat part of the ceramic cylindrical support, the element can be heated without losing the advantage of the temperature increase characteristic of the conventional thick film laminated element. Since the element strength can be improved more than that, it has excellent durability. Further, since the support body is cylindrical, processing on the holder side for fixing the element is only required by drilling with a drill, making it extremely simple.
更に、セラミツクスグリーンシートの積層によ
つて形成する部分を必要最小限にすることがで
き、素子の支持体部分を形成するための積層及び
圧着が必要でなくなるので製造工程を簡単にでき
る。しかも従来の円筒状素子のように円筒の側面
部にセラミツクスグリーンシートを巻き付けて圧
着するよりもセラミツクスグリーンシートの密着
をより確実にかつ容易に行うことができる。 Furthermore, the portion formed by laminating the ceramic green sheets can be minimized, and the manufacturing process can be simplified since lamination and pressure bonding for forming the support portion of the element are no longer necessary. In addition, the ceramic green sheet can be more securely and easily attached than the conventional cylindrical element in which the ceramic green sheet is wrapped around the side surface of a cylinder and crimped.
第１図は本考案の酸素濃度検出素子の第１実施
例の平面図、第２図は第１図の素子の酸化物半導
体及びPt電極を形成したセラミツクスグリーン
シート面を示す平面図、第３図は第１図の素子の
Ptヒータを形成したセラミツクスグリーンシー
ト面を示す平面図、第４図は第１図の素子の正面
図、第５図は第１図の素子の右側面図、第６図は
本考案の素子の第２実施例の正面図、第７図は本
考案の素子の第３実施例の正面図、第８図は第７
図の素子の右側面図、第９図は従来の酸素濃度検
出素子の一例のセラミツクスグリーンシートをセ
ラミツクス製支持体へ被覆する工程を示す斜視
図、第１０図は第９図の素子のヒータ及びリード
線を形成したセラミツクスグリーンシートの平面
図、第１１図は第９図の素子の酸化物半導体及び
リード線を形成したセラミツクスグリーンシート
の平面図である。
図中、１……酸素濃度検出素子、２……セラミ
ツクス製支持体、３，１２……窓、４，５，１８
……セラミツクスグリーンシート、６……リード
線保護用シート、７，１７……ヒータ、８……ヒ
ータ部、９，１５……酸化物半導体、１０……感
応部、１１，１９，２０……リード線、１３……
円柱状支持体、１４……平面部、１６……電極、
２１……保護層、２２……傾斜部。
FIG. 1 is a plan view of the first embodiment of the oxygen concentration detection element of the present invention, FIG. The figure shows the element in Figure 1.
A plan view showing the surface of a ceramic green sheet on which a Pt heater is formed, FIG. 4 is a front view of the device in FIG. 1, FIG. 5 is a right side view of the device in FIG. 1, and FIG. 6 is a view of the device of the present invention. FIG. 7 is a front view of the second embodiment of the device of the present invention, FIG. 8 is a front view of the third embodiment of the device of the present invention, and FIG.
9 is a perspective view showing the process of coating a ceramic support with a ceramic green sheet, which is an example of a conventional oxygen concentration detection element, and FIG. 10 is a heater and a FIG. 11 is a plan view of a ceramic green sheet with lead wires formed thereon. FIG. 11 is a plan view of a ceramic green sheet with lead wires formed thereon and the oxide semiconductor of the device shown in FIG. In the figure, 1...Oxygen concentration detection element, 2...Ceramics support, 3, 12...Window, 4, 5, 18
... Ceramics green sheet, 6 ... Lead wire protection sheet, 7, 17 ... Heater, 8 ... Heater section, 9, 15 ... Oxide semiconductor, 10 ... Sensing section, 11, 19, 20 ... Lead wire, 13...
Cylindrical support, 14... Planar part, 16... Electrode,
21...protective layer, 22...slanted part.
Claims (1)
面部を設け、該平面部上に酸素濃度検出部、電極
及びヒータを形成したセラミツクスグリンシート
を積層し焼成して、セラミツクスシートを前記セ
ラミツクス製円柱状支持体の平面部と一体に形成
して素子と成したことを特徴とする抵抗検出型酸
素濃度検出素子。 A ceramic cylindrical support is provided with a flat part in the direction of the cylinder axis, and a ceramic green sheet on which an oxygen concentration detection part, an electrode, and a heater are formed is laminated and fired to form the ceramic sheet into the ceramic cylindrical shape. 1. A resistance detection type oxygen concentration detection element, characterized in that the element is formed integrally with a flat part of a support.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17915087U JPH0522859Y2 (en) | 1987-11-25 | 1987-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17915087U JPH0522859Y2 (en) | 1987-11-25 | 1987-11-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0184053U JPH0184053U (en) | 1989-06-05 |
| JPH0522859Y2 true JPH0522859Y2 (en) | 1993-06-11 |
Family
ID=31470730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17915087U Expired - Lifetime JPH0522859Y2 (en) | 1987-11-25 | 1987-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522859Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6811177B2 (en) * | 2016-03-16 | 2021-01-13 | 日本特殊陶業株式会社 | Ceramic heater |
-
1987
- 1987-11-25 JP JP17915087U patent/JPH0522859Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0184053U (en) | 1989-06-05 |
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