JPS63157653U - - Google Patents
Info
- Publication number
- JPS63157653U JPS63157653U JP5103887U JP5103887U JPS63157653U JP S63157653 U JPS63157653 U JP S63157653U JP 5103887 U JP5103887 U JP 5103887U JP 5103887 U JP5103887 U JP 5103887U JP S63157653 U JPS63157653 U JP S63157653U
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- oxide layer
- electrodes
- pair
- parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
- 229910052596 spinel Inorganic materials 0.000 claims description 2
- 239000011029 spinel Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は本考案に係る酸素センサの一実施例を
示す断面図、第２図は従来例を示す概略構成図、
第３図は第２図の―断面図、第４図は従来の
問題点を説明するための第３図の部分拡大図、第
５図は耐久試験による酸素センサ出力の変化を示
すグラフである。
１……基板、２，３……電極、４……酸化チタ
ン層、１０……ＭｇＯ・Ａｌ２Ｏ３スピネル層。
FIG. 1 is a sectional view showing an embodiment of an oxygen sensor according to the present invention, FIG. 2 is a schematic configuration diagram showing a conventional example,
Fig. 3 is a sectional view of Fig. 2, Fig. 4 is a partially enlarged view of Fig. 3 to explain the conventional problems, and Fig. 5 is a graph showing changes in oxygen sensor output due to durability tests. . 1... Substrate, 2, 3... Electrode, 4... Titanium oxide layer, 10... MgO.Al 2 O 3 spinel layer.
Claims (1)
極上に酸化チタン層を積層してなり、前記並設し
た電極間に介在する酸化チタン層の電気抵抗変化
に基づいて酸素濃度を検出するよう構成した酸素
センサにおいて、前記酸化チタン層の外表面を覆
うＭｇＯ・Ａｌ２Ｏ３スピネル層を設けたことを
特徴とする酸素センサ。 A pair of electrodes are arranged in parallel on one side of the substrate, and a titanium oxide layer is laminated on the pair of electrodes, and the oxygen concentration is adjusted based on the change in electrical resistance of the titanium oxide layer interposed between the parallel electrodes. An oxygen sensor configured to detect oxygen, characterized in that an MgO.Al 2 O 3 spinel layer is provided to cover the outer surface of the titanium oxide layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5103887U JPS63157653U (en) | 1987-04-06 | 1987-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5103887U JPS63157653U (en) | 1987-04-06 | 1987-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157653U true JPS63157653U (en) | 1988-10-17 |
Family
ID=30874943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5103887U Pending JPS63157653U (en) | 1987-04-06 | 1987-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157653U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518922A (en) * | 1978-07-26 | 1980-02-09 | Fuji Electric Co Ltd | Oxygen sensor |
| JPS56162041A (en) * | 1980-05-16 | 1981-12-12 | Fuji Electric Co Ltd | Oxygen sensor |
| JPS5739341A (en) * | 1980-08-22 | 1982-03-04 | Toyota Motor Corp | Oxygen sensor |
-
1987
- 1987-04-06 JP JP5103887U patent/JPS63157653U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518922A (en) * | 1978-07-26 | 1980-02-09 | Fuji Electric Co Ltd | Oxygen sensor |
| JPS56162041A (en) * | 1980-05-16 | 1981-12-12 | Fuji Electric Co Ltd | Oxygen sensor |
| JPS5739341A (en) * | 1980-08-22 | 1982-03-04 | Toyota Motor Corp | Oxygen sensor |