JPS61149866U - - Google Patents
Info
- Publication number
- JPS61149866U JPS61149866U JP3334685U JP3334685U JPS61149866U JP S61149866 U JPS61149866 U JP S61149866U JP 3334685 U JP3334685 U JP 3334685U JP 3334685 U JP3334685 U JP 3334685U JP S61149866 U JPS61149866 U JP S61149866U
- Authority
- JP
- Japan
- Prior art keywords
- titanium oxide
- electrodes
- oxide layer
- porous titanium
- alumina substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010304 firing Methods 0.000 claims 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図Ａ，Ｂは従来例を示す断面図及び平面図、第３
図は酸化チタンの抵抗値と酸素濃度との関係を示
すグラフである。
９…酸素センサ、１０…アルミナ製基板、１１
ａ…酸化チタン層（緻密）、１１ｂ…酸化チタン
層（多孔性）、１２，１３…電極。
Fig. 1 is a sectional view showing one embodiment of the present invention;
Figures A and B are cross-sectional views and plan views showing the conventional example;
The figure is a graph showing the relationship between the resistance value of titanium oxide and the oxygen concentration. 9... Oxygen sensor, 10... Alumina substrate, 11
a... Titanium oxide layer (dense), 11b... Titanium oxide layer (porous), 12, 13... Electrode.
Claims (1)
、多孔性酸化チタン層を順次積層してなり、前記
２つの電極間に介在する多孔性酸化チタン層の電
気抵抗変化によつて酸素濃度を検出するようにし
た酸素センサにおいて、前記アルミナ製基板と２
つの電極との間にこれらと同時焼成される緻密な
酸化チタン層を介在させ、該緻密な酸化チタン層
及び前記２つの電極の外表面に前記焼成時の温度
より低温で焼成して形成される多孔性酸化チタン
層を積層したことを特徴とする酸素センサ。 Two opposing electrodes and a porous titanium oxide layer are sequentially laminated on one side of an alumina substrate, and the oxygen concentration is detected by the change in electrical resistance of the porous titanium oxide layer interposed between the two electrodes. In the oxygen sensor, the alumina substrate and the second
A dense titanium oxide layer is interposed between the two electrodes and is fired simultaneously with the two electrodes, and the dense titanium oxide layer and the outer surfaces of the two electrodes are fired at a lower temperature than the firing temperature. An oxygen sensor characterized by stacking porous titanium oxide layers.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3334685U JPS61149866U (en) | 1985-03-11 | 1985-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3334685U JPS61149866U (en) | 1985-03-11 | 1985-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149866U true JPS61149866U (en) | 1986-09-16 |
Family
ID=30535711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3334685U Pending JPS61149866U (en) | 1985-03-11 | 1985-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149866U (en) |
-
1985
- 1985-03-11 JP JP3334685U patent/JPS61149866U/ja active Pending