JPS6358743U - - Google Patents
Info
- Publication number
- JPS6358743U JPS6358743U JP15244486U JP15244486U JPS6358743U JP S6358743 U JPS6358743 U JP S6358743U JP 15244486 U JP15244486 U JP 15244486U JP 15244486 U JP15244486 U JP 15244486U JP S6358743 U JPS6358743 U JP S6358743U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- pair
- titanium oxide
- oxide layer
- oxygen sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 238000002955 isolation Methods 0.000 claims 1
- 229910052751 metal Inorganic materials 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図は従来例を示す概略構成図、第３図は第２図の
―断面図、第４図は第３図の部分拡大図であ
る。
１……アルミナ製基板、２，３……電極、４…
…酸化チタン層、１０，１１……ジルコン層。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure is a schematic configuration diagram showing a conventional example, FIG. 3 is a cross-sectional view taken from FIG. 2, and FIG. 4 is a partially enlarged view of FIG. 3. 1... Alumina substrate, 2, 3... Electrode, 4...
...Titanium oxide layer, 10,11...Zircon layer.
Claims (1)
該一対の電極上に酸化チタン層を積層してなり、
前記並設した電極間に介在する酸化チタン層の電
気抵抗変化に基づいて酸素濃度を検出する構成の
酸素センサにおいて、前記基板と一対の電極それ
ぞれとの間に４価の金属の酸化物で形成される隔
離層を介在させたことを特徴とする酸素センサ。 A pair of electrodes are placed side by side on one side of an alumina substrate,
A titanium oxide layer is laminated on the pair of electrodes,
In the oxygen sensor configured to detect oxygen concentration based on a change in electrical resistance of a titanium oxide layer interposed between the parallel electrodes, an oxide of a tetravalent metal is formed between the substrate and each of the pair of electrodes. An oxygen sensor characterized by having an isolation layer interposed therebetween.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15244486U JPS6358743U (en) | 1986-10-06 | 1986-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15244486U JPS6358743U (en) | 1986-10-06 | 1986-10-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6358743U true JPS6358743U (en) | 1988-04-19 |
Family
ID=31070424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15244486U Pending JPS6358743U (en) | 1986-10-06 | 1986-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6358743U (en) |
-
1986
- 1986-10-06 JP JP15244486U patent/JPS6358743U/ja active Pending