JPS62191Y2 - - Google Patents

Info

Publication number
JPS62191Y2
JPS62191Y2 JP1983016597U JP1659783U JPS62191Y2 JP S62191 Y2 JPS62191 Y2 JP S62191Y2 JP 1983016597 U JP1983016597 U JP 1983016597U JP 1659783 U JP1659783 U JP 1659783U JP S62191 Y2 JPS62191 Y2 JP S62191Y2
Authority
JP
Japan
Prior art keywords
potential
circuit
electron beam
measured
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983016597U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58150839U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1659783U priority Critical patent/JPS58150839U/ja
Publication of JPS58150839U publication Critical patent/JPS58150839U/ja
Application granted granted Critical
Publication of JPS62191Y2 publication Critical patent/JPS62191Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1659783U 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置 Granted JPS58150839U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1659783U JPS58150839U (ja) 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1659783U JPS58150839U (ja) 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置

Publications (2)

Publication Number Publication Date
JPS58150839U JPS58150839U (ja) 1983-10-08
JPS62191Y2 true JPS62191Y2 (cs) 1987-01-07

Family

ID=30028960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1659783U Granted JPS58150839U (ja) 1983-02-07 1983-02-07 電子ビ−ムを用いた測定装置

Country Status (1)

Country Link
JP (1) JPS58150839U (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120255B2 (cs) * 1972-11-17 1976-06-23

Also Published As

Publication number Publication date
JPS58150839U (ja) 1983-10-08

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